GaAs metal-oxide-semiconductor capacitor with Nd-based high-k oxynitrides as gate dielectric and passivation layer

  • L. N. Liu
  • , H. W. Choi
  • , J. P. Xu
  • , W. M. Tang
  • , P. T. Lai

Research output: Journal article publicationJournal articleAcademic researchpeer-review

10 Citations (Scopus)

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Material Science

Engineering