Frequency tunable micromachined RF oscillators

Y. C. Loke; K. M. Liew; Q. Zou; A. Q. Liu

doi:10.1117/12.404898

Frequency tunable micromachined RF oscillators

Y. C. Loke, K. M. Liew, Q. Zou, A. Q. Liu

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.

Original language	English
Pages (from-to)	18-25
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4230
DOIs	https://doi.org/10.1117/12.404898
Publication status	Published - Oct 2000
Externally published	Yes

Keywords

Bandpass filter
RF MEMS
Superheterodyne receiver
Tunable oscillators

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.404898

Cite this

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keywords = "Bandpass filter, RF MEMS, Superheterodyne receiver, Tunable oscillators",

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AU - Zou, Q.

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KW - RF MEMS

KW - Superheterodyne receiver

KW - Tunable oscillators

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JF - Proceedings of SPIE - The International Society for Optical Engineering

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Frequency tunable micromachined RF oscillators

Abstract

Keywords

ASJC Scopus subject areas

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