Formation of Ge nanocrystals in high-k dielectrics for non-volatile memory application by utilizing nanocluster source

P.F. Lee, X.B. Lu, Jiyan Dai, H.L.W. Chan

Research output: Unpublished conference presentation (presented paper, abstract, poster)Conference presentation (not published in journal/proceeding/book)Academic researchpeer-review

Original languageEnglish
Publication statusPublished - 2006
EventE-MRS Spring Meeting -
Duration: 1 Jan 2006 → …

Conference

ConferenceE-MRS Spring Meeting
Period1/01/06 → …

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