Focus errors and their correction in microscopic deformation analysis using correlation

Mark C. Pitter, Chung W. See, Jason Y.L. Goh, Michael Geoffrey Somekh

Research output: Journal article publicationJournal articleAcademic researchpeer-review

7 Citations (Scopus)

Abstract

Subpixel digital image correlation has been applied to microscope images to analyze surface deformation. Nonintegral pixel shifting and successive approximation are used to calculate the subpixel element of the sample displacement without introducing systematic interpolation errors. Although in-plane displacement precision of better than 2% of a pixel, or < 15 nm at x10 magnification, is shown to be achievable, the use of even moderate numerical aperture microscope objectives render the technique sensitive to errors or variations in sample focusing. The magnitude of this effect is determined experimentally and a focus compensation method is described and demonstrated.
Original languageEnglish
Pages (from-to)1361-1367
Number of pages7
JournalOptics Express
Volume10
Issue number23
DOIs
Publication statusPublished - 1 Jan 2002
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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