TY - GEN
T1 - Fluid jet polishing of functional structured surfaces
AU - Wang, Chunjin
AU - Zhang, Zili
AU - Cheung, Chi Fai
PY - 2024/10
Y1 - 2024/10
N2 - Functional structured surfaces, which find extensive applications in optics, microfluidics, and other fields, often require nanometric surface roughness to deliver superior performance. This requirement presents significant challenges in the polishing of such surfaces. This study introduces Fluid Jet Polishing (FJP) as a potential solution to this challenge. FJP employs a low-pressure micro/nano scale abrasive water jet slurry, which is impinged upon the structured surface, facilitating minute material removal without the need for a mask. A series of experiments were conducted to test the efficacy of FJP on the polishing of microfluidic channels and cylindrical structured array surfaces. In addition, a surface form maintenance strategy was proposed to enhance form maintainability. The quality of the surfaces, both pre and post-polishing, was analyzed in terms of surface roughness, form maintainability, and surface topography. The results indicate that FJP can significantly enhance the surface quality of functional structured surfaces while maintaining high form maintainability under certain conditions. Thus, FJP shows promise as a competitive method for the precision polishing of functional structured surfaces across various applications.
AB - Functional structured surfaces, which find extensive applications in optics, microfluidics, and other fields, often require nanometric surface roughness to deliver superior performance. This requirement presents significant challenges in the polishing of such surfaces. This study introduces Fluid Jet Polishing (FJP) as a potential solution to this challenge. FJP employs a low-pressure micro/nano scale abrasive water jet slurry, which is impinged upon the structured surface, facilitating minute material removal without the need for a mask. A series of experiments were conducted to test the efficacy of FJP on the polishing of microfluidic channels and cylindrical structured array surfaces. In addition, a surface form maintenance strategy was proposed to enhance form maintainability. The quality of the surfaces, both pre and post-polishing, was analyzed in terms of surface roughness, form maintainability, and surface topography. The results indicate that FJP can significantly enhance the surface quality of functional structured surfaces while maintaining high form maintainability under certain conditions. Thus, FJP shows promise as a competitive method for the precision polishing of functional structured surfaces across various applications.
KW - Fluid jet polishing
KW - structured surfaces
KW - finishing
KW - ultra-precision machining
M3 - Conference article published in proceeding or book
T3 - Proceedings of ICPE2024
SP - 1
EP - 4
BT - Proceedings of ICPE2024: The 20th International Conference on Precision Engineering
T2 - 20th International Conference on Precision Engineering (ICPE2024)
Y2 - 23 October 2024 through 26 October 2024
ER -