Fluid jet polishing of functional structured surfaces

Chunjin Wang (Corresponding Author), Zili Zhang, Chi Fai Cheung

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

Functional structured surfaces, which find extensive applications in optics, microfluidics, and other fields, often require nanometric surface roughness to deliver superior performance. This requirement presents significant challenges in the polishing of such surfaces. This study introduces Fluid Jet Polishing (FJP) as a potential solution to this challenge. FJP employs a low-pressure micro/nano scale abrasive water jet slurry, which is impinged upon the structured surface, facilitating minute material removal without the need for a mask. A series of experiments were conducted to test the efficacy of FJP on the polishing of microfluidic channels and cylindrical structured array surfaces. In addition, a surface form maintenance strategy was proposed to enhance form maintainability. The quality of the surfaces, both pre and post-polishing, was analyzed in terms of surface roughness, form maintainability, and surface topography. The results indicate that FJP can significantly enhance the surface quality of functional structured surfaces while maintaining high form maintainability under certain conditions. Thus, FJP shows promise as a competitive method for the precision polishing of functional structured surfaces across various applications.
Original languageEnglish
Title of host publicationProceedings of ICPE2024: The 20th International Conference on Precision Engineering
Pages1-4
Number of pages4
Publication statusPublished - Oct 2024
Event20th International Conference on Precision Engineering (ICPE2024) - SENDAI, Japan
Duration: 23 Oct 202426 Oct 2024

Publication series

NameProceedings of ICPE2024

Conference

Conference20th International Conference on Precision Engineering (ICPE2024)
Abbreviated titleICPE2024
Country/TerritoryJapan
CitySENDAI
Period23/10/2426/10/24

Keywords

  • Fluid jet polishing
  • structured surfaces
  • finishing
  • ultra-precision machining

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