Flexible transfer of aligned carbon nanotube films for integration at lower temperature

The high growth temperature of carbon nanotubes (CNTs) hinders their direct assembly on temperature-sensitive substrates. We present a method to transfer an aligned CNT film at room temperature to overcome this problem. Using a 'liftoff' technique with hydrofluoric acid solution, we separate the aligned CNT film from the silicon substrate. The lifted-off CNT film is suspended in water, remaining intact and aligned due to the crowding effect. We then transfer the suspended film to various substrates that are sensitive to high temperature. To illustrate the quality of the transferred CNT film, we demonstrate that the thermal interface resistance of the transferred CNT film is comparable with that of as-grown CNT film. This transfer process can be extended to many microelectronics applications, such as field emission devices, integrated circuit interconnects and sensors, requiring processing temperatures not compatible with CNT growth.