Abstract
This paper studies the static and dynamic mechanical behaviors of novel micro-electro-mechanical systems (MEMS) fiber-optical switch actuated by electrostatic attraction. The switch is composed of a skew plate, two drawing beams, a mirror and a substrate. The plate is restrained translationally at one end. The drawing beams provide additional restrain to the plate. The mirror is mounted on the plate. Three identical bending beams are inserted inside the plate to adjust the bending rigidity of the switch. Static and dynamic finite element (FE) simulations are implemented to obtain the mechanical characteristics of the minimum switching or pull-in voltages, the natural frequences, mode shapes and responses under different levels of electrostatic attraction loads. A theoretical dynamic model is further developed to validate the FE simulation results. Good agreement is found between the FE simulation and the analytical results.
| Original language | English |
|---|---|
| Pages (from-to) | 167-178 |
| Number of pages | 12 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 96 |
| Issue number | 2-3 |
| DOIs | |
| Publication status | Published - 28 Feb 2002 |
| Externally published | Yes |
Keywords
- Finite element simulation
- Mechanical characteristics
- MEMS fiber-optical switch
- Theoretical study
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering