TY - JOUR
T1 - Finger-inspired rigid-soft hybrid tactile sensor with superior sensitivity at high frequency
AU - Zhang, Jinhui
AU - Yao, Haimin
AU - Mo, Jiaying
AU - Chen, Songyue
AU - Xie, Yu
AU - Ma, Shenglin
AU - Chen, Rui
AU - Luo, Tao
AU - Ling, Weisong
AU - Qin, Lifeng
AU - Wang, Zuankai
AU - Zhou, Wei
N1 - Funding Information:
We acknowledge support from the National Natural Science Foundation of China (no. 51922092, no. 52005423, no. U21A20136), Fundamental Research Funds for the Central Universities (no. 20720200068), China Postdoctoral Science Foundation (no. 2020M671946), and Health@InnoHK (Hong Kong Centre for Cerebro-cardiovascular Health Engineering (COCHE)). The authors thank professor Zhong-Qun Tian, professor Wenjing Hong, Dr. Xuyang Chu, Dr. Yunsong Lian, Dr. Shaogan Ye, Dr. Yanming Xia, Huiran Zhang, Maoyu Lin, Jigang Ge, Hu Xia, Chun Yang, Tingting Lian, Jincheng Wang, Da Geng, Renpeng Wang, Xinying Zhu, Xiaodong Wu, and Linjing Wu for the help during the research.
Publisher Copyright:
© 2022, The Author(s).
PY - 2022/12
Y1 - 2022/12
N2 - Among kinds of flexible tactile sensors, piezoelectric tactile sensor has the advantage of fast response for dynamic force detection. However, it suffers from low sensitivity at high-frequency dynamic stimuli. Here, inspired by finger structure—rigid skeleton embedded in muscle, we report a piezoelectric tactile sensor using a rigid-soft hybrid force-transmission-layer in combination with a soft bottom substrate, which not only greatly enhances the force transmission, but also triggers a significantly magnified effect in d31 working mode of the piezoelectric sensory layer, instead of conventional d33 mode. Experiments show that this sensor exhibits a super-high sensitivity of 346.5 pC N−1 (@ 30 Hz), wide bandwidth of 5–600 Hz and a linear force detection range of 0.009–4.3 N, which is ~17 times the theoretical sensitivity of d33 mode. Furthermore, the sensor is able to detect multiple force directions with high reliability, and shows great potential in robotic dynamic tactile sensing.
AB - Among kinds of flexible tactile sensors, piezoelectric tactile sensor has the advantage of fast response for dynamic force detection. However, it suffers from low sensitivity at high-frequency dynamic stimuli. Here, inspired by finger structure—rigid skeleton embedded in muscle, we report a piezoelectric tactile sensor using a rigid-soft hybrid force-transmission-layer in combination with a soft bottom substrate, which not only greatly enhances the force transmission, but also triggers a significantly magnified effect in d31 working mode of the piezoelectric sensory layer, instead of conventional d33 mode. Experiments show that this sensor exhibits a super-high sensitivity of 346.5 pC N−1 (@ 30 Hz), wide bandwidth of 5–600 Hz and a linear force detection range of 0.009–4.3 N, which is ~17 times the theoretical sensitivity of d33 mode. Furthermore, the sensor is able to detect multiple force directions with high reliability, and shows great potential in robotic dynamic tactile sensing.
UR - http://www.scopus.com/inward/record.url?scp=85136849247&partnerID=8YFLogxK
U2 - 10.1038/s41467-022-32827-7
DO - 10.1038/s41467-022-32827-7
M3 - Journal article
C2 - 36038557
AN - SCOPUS:85136849247
SN - 2041-1723
VL - 13
JO - Nature Communications
JF - Nature Communications
IS - 1
M1 - 5076
ER -