Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate

Y. J. Li, Shu Ping Lau, B. K. Tay, Z. Sun, G. Y. Chen, J. S. Chen, X. Z. Ding

Research output: Journal article publicationConference articleAcademic researchpeer-review

3 Citations (Scopus)

Abstract

The field emission from heat treated cobalt containing carbon films was reported. The films were grown on glass substrates by means of filtered cathodic vacuum arc (FCVA) technique at low temperature in acetylene and nitrogen ambients. The heat-treated films retained smooth surface with a root mean square roghness, which could be used in the fabrication of gated emitter array for field emission displays.
Original languageEnglish
Pages (from-to)950-953
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume19
Issue number3
DOIs
Publication statusPublished - 1 May 2001
Externally publishedYes
Event13th International Vaccum Microelectronics Conference - Guangzhou, China
Duration: 14 Aug 200017 Aug 2000

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this