Abstract
The field emission from heat treated cobalt containing carbon films was reported. The films were grown on glass substrates by means of filtered cathodic vacuum arc (FCVA) technique at low temperature in acetylene and nitrogen ambients. The heat-treated films retained smooth surface with a root mean square roghness, which could be used in the fabrication of gated emitter array for field emission displays.
Original language | English |
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Pages (from-to) | 950-953 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 19 |
Issue number | 3 |
DOIs | |
Publication status | Published - 1 May 2001 |
Externally published | Yes |
Event | 13th International Vaccum Microelectronics Conference - Guangzhou, China Duration: 14 Aug 2000 → 17 Aug 2000 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering