Fiber-optic fabry-pérot acoustic sensor with multilayer graphene diaphragm

Jun Ma, Haifeng Xuan, Hoi Lut Ho, Wei Jin, Yuanhong Yang, Shangchun Fan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

241 Citations (Scopus)


A fiber-optic Fabry-Pérot acoustic sensor with a ∼ 100-nm-thick multilayer graphene diaphragm is reported. Acoustic testing demonstrates a pressure-induced deflection of 1100 nm/kPa and a noise equivalent acoustic signal level of ∼ 60μ Pa Hz1/2 at the frequency of 10 kHz. The sensor exhibits a flat frequency response from 0.2 to 22 kHz and may be useful for highly sensitive acoustic sensing.
Original languageEnglish
Article number6493391
Pages (from-to)932-935
Number of pages4
JournalIEEE Photonics Technology Letters
Issue number10
Publication statusPublished - 20 May 2013


  • Acoustic sensing
  • Fabry-Pérot
  • multilayer graphene
  • optical fiber sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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