Feature development on prepatterned elastomer surfaces upon ion implantation

Y. Sun; H. Y. Wang; T. Xiong; P. K. Chu; Chi Wah Leung

doi:10.1016/j.mee.2013.02.054

Feature development on prepatterned elastomer surfaces upon ion implantation

Y. Sun, H. Y. Wang, T. Xiong, P. K. Chu, Chi Wah Leung

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

Oxygen plasma ion implantation on the common elastomer polydimethylsiloxane (PDMS) can induce wrinkled and disordered surface morphologies. Here we present a convenient approach of generating (sub)micron-sized features, in order to control the development of such ripple-like features during plasma treatment process. The correlations between the spontaneous patterns with different surface treatment conditions, such as plasma bias voltage and processing time, as well as the effect of surface prepatterns, were studied. The presence of prepatterns suppressed the formation of ripples on the implanted PDMS surfaces, which is advantageous for eliminating the rough surface topologies induced in plasma-treated samples.

Original language	English
Pages (from-to)	346-349
Number of pages	4
Journal	Microelectronic Engineering
Volume	110
DOIs	https://doi.org/10.1016/j.mee.2013.02.054
Publication status	Published - 1 Jan 2013

Keywords

Ion implantation
PDMS
Prepatterning

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/j.mee.2013.02.054

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@article{384b3aaf0b7a41789ed548fa8467cf36,

title = "Feature development on prepatterned elastomer surfaces upon ion implantation",

abstract = "Oxygen plasma ion implantation on the common elastomer polydimethylsiloxane (PDMS) can induce wrinkled and disordered surface morphologies. Here we present a convenient approach of generating (sub)micron-sized features, in order to control the development of such ripple-like features during plasma treatment process. The correlations between the spontaneous patterns with different surface treatment conditions, such as plasma bias voltage and processing time, as well as the effect of surface prepatterns, were studied. The presence of prepatterns suppressed the formation of ripples on the implanted PDMS surfaces, which is advantageous for eliminating the rough surface topologies induced in plasma-treated samples.",

keywords = "Ion implantation, PDMS, Prepatterning",

author = "Y. Sun and Wang, {H. Y.} and T. Xiong and Chu, {P. K.} and Leung, {Chi Wah}",

year = "2013",

month = jan,

day = "1",

doi = "10.1016/j.mee.2013.02.054",

language = "English",

volume = "110",

pages = "346--349",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Feature development on prepatterned elastomer surfaces upon ion implantation

AU - Sun, Y.

AU - Wang, H. Y.

AU - Xiong, T.

AU - Chu, P. K.

AU - Leung, Chi Wah

PY - 2013/1/1

Y1 - 2013/1/1

N2 - Oxygen plasma ion implantation on the common elastomer polydimethylsiloxane (PDMS) can induce wrinkled and disordered surface morphologies. Here we present a convenient approach of generating (sub)micron-sized features, in order to control the development of such ripple-like features during plasma treatment process. The correlations between the spontaneous patterns with different surface treatment conditions, such as plasma bias voltage and processing time, as well as the effect of surface prepatterns, were studied. The presence of prepatterns suppressed the formation of ripples on the implanted PDMS surfaces, which is advantageous for eliminating the rough surface topologies induced in plasma-treated samples.

AB - Oxygen plasma ion implantation on the common elastomer polydimethylsiloxane (PDMS) can induce wrinkled and disordered surface morphologies. Here we present a convenient approach of generating (sub)micron-sized features, in order to control the development of such ripple-like features during plasma treatment process. The correlations between the spontaneous patterns with different surface treatment conditions, such as plasma bias voltage and processing time, as well as the effect of surface prepatterns, were studied. The presence of prepatterns suppressed the formation of ripples on the implanted PDMS surfaces, which is advantageous for eliminating the rough surface topologies induced in plasma-treated samples.

KW - Ion implantation

KW - PDMS

KW - Prepatterning

UR - http://www.scopus.com/inward/record.url?scp=84885171630&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2013.02.054

DO - 10.1016/j.mee.2013.02.054

M3 - Journal article

SN - 0167-9317

VL - 110

SP - 346

EP - 349

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Feature development on prepatterned elastomer surfaces upon ion implantation

Abstract

Keywords

ASJC Scopus subject areas

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