Feature development on prepatterned elastomer surfaces upon ion implantation

Y. Sun, H. Y. Wang, T. Xiong, P. K. Chu, Chi Wah Leung

Research output: Journal article publicationJournal articleAcademic researchpeer-review


Oxygen plasma ion implantation on the common elastomer polydimethylsiloxane (PDMS) can induce wrinkled and disordered surface morphologies. Here we present a convenient approach of generating (sub)micron-sized features, in order to control the development of such ripple-like features during plasma treatment process. The correlations between the spontaneous patterns with different surface treatment conditions, such as plasma bias voltage and processing time, as well as the effect of surface prepatterns, were studied. The presence of prepatterns suppressed the formation of ripples on the implanted PDMS surfaces, which is advantageous for eliminating the rough surface topologies induced in plasma-treated samples.
Original languageEnglish
Pages (from-to)346-349
Number of pages4
JournalMicroelectronic Engineering
Publication statusPublished - 1 Jan 2013


  • Ion implantation
  • PDMS
  • Prepatterning

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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