Feasibility of the 248 nm Excimer laser in the laser structuring of fine circuit lines on printed circuit board

Bin Zhang, Kam Chuen Yung

Research output: Journal article publicationJournal articleAcademic researchpeer-review

3 Citations (Scopus)

Abstract

Excimer laser (KrF) is used as a new laser source to determine its feasibility in the laser structuring process. Compared with frequency-tripled Nd:YAG lasers, the Excimer laser can conveniently change the spot size of a laser beam to get a smaller sized circuit line/space by inserting a mask. Some frequently used laser parameters of the Excimer laser are discussed in this paper, such as laser energy, number of repetition, repetition rate, bite size and laser beam size. The differences between the Nd:YAG laser and the Excimer laser in laser structuring are also explored in this paper.
Original languageEnglish
Pages (from-to)1149-1158
Number of pages10
JournalInternational Journal of Advanced Manufacturing Technology
Volume33
Issue number11-12
DOIs
Publication statusPublished - 1 Aug 2007

Keywords

  • Excimer laser
  • Laser structuring
  • Mask

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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