Keyphrases
Amorphous Silicon
20%
Brittle Materials
20%
Diamond
20%
Diamond Grinding
20%
Diamond Milling
20%
Ductile Machining
100%
Form Error
20%
Fracture Toughness
20%
Infrared Optics
20%
Infrared Optoelectronics
20%
Ion Implantation
20%
Laser Machining
20%
Long Swings
20%
Machinability
20%
Machined Surface
20%
Machining Depth
40%
Machining Model
40%
Material Phase
20%
Microgroove
40%
Microstructure
100%
Modeling Results
20%
Multicrystalline Silicon
100%
Optical Industry
20%
Optoelectronic Industry
20%
Phase Transformation
20%
Plunge Cutting
20%
Surface Micro-topography
20%
Surface Quality
40%
Tool Life
20%
Tool Wear
20%
Ultra-precision Fly Cutting
100%
Ultra-smooth Surface
20%
Vibration-assisted Machining
20%
Wear Pattern
20%
Engineering
Assisted Machining
25%
Brittleness
25%
Diamond
50%
Ductile Machining
100%
Ductile Machining Model
50%
Experimental Result
25%
Form Error
25%
Fracture Strength
25%
Grinding (Machining)
25%
Ion Implantation
25%
Machined Surface
25%
Material Phase
25%
Microstructure
100%
Optoelectronics
25%
Silicon Single Crystal
100%
Smooth Surface
25%
Surface Quality
50%
Vibration-Assisted Machining
25%