TY - JOUR
T1 - Fabry–Perot cavity-based contact force sensor with high precision and a broad operational range
AU - Dash, Jitendra Narayan
AU - Liu, Zhengyong
AU - Gunawardena, Dinusha Serandi
AU - Tam, Hwa Yaw
N1 - Funding Information:
Hong Kong Polytechnic University (PolyU) (1-ZVGB, 1-BBYE, 1-BBYS).
Publisher Copyright:
© 2019 Optical Society of America
PY - 2019
Y1 - 2019
N2 - A novel, compact, and robust contact force sensor based on a micro-length single-mode fiber (SMF) incorporated in a cleaved micro-air cavity (MAC) is proposed. The fabrication process involves splicing of the SMF with a hollow-core fiber (HCF) followed by cleaving of the MAC and insertion of a SMF into the MAC. The force sensing mechanism is based on the movement of the micro-SMF inside the cleaved MAC. The total length of the probe varies between 300 and 500 μm, making it bend proof. Due to the all-silica-based structure, the sensing capability of the probe is demonstrated for a low (0–1000 mN), as well as a high range of force (1–10 N) measurements. The optimized structure shows a maximum force sensitivity of 14.2 pm/mN with a negligible temperature dependence of 0.4 pm/°C. The performance of the sensor is verified using an FEM-based software. The proposed probe has a linear response, negligible hysteresis, and repeatability error, making it suitable for biomedical sensing and robotic applications.
AB - A novel, compact, and robust contact force sensor based on a micro-length single-mode fiber (SMF) incorporated in a cleaved micro-air cavity (MAC) is proposed. The fabrication process involves splicing of the SMF with a hollow-core fiber (HCF) followed by cleaving of the MAC and insertion of a SMF into the MAC. The force sensing mechanism is based on the movement of the micro-SMF inside the cleaved MAC. The total length of the probe varies between 300 and 500 μm, making it bend proof. Due to the all-silica-based structure, the sensing capability of the probe is demonstrated for a low (0–1000 mN), as well as a high range of force (1–10 N) measurements. The optimized structure shows a maximum force sensitivity of 14.2 pm/mN with a negligible temperature dependence of 0.4 pm/°C. The performance of the sensor is verified using an FEM-based software. The proposed probe has a linear response, negligible hysteresis, and repeatability error, making it suitable for biomedical sensing and robotic applications.
UR - http://www.scopus.com/inward/record.url?scp=85069565284&partnerID=8YFLogxK
U2 - 10.1364/OL.44.003546
DO - 10.1364/OL.44.003546
M3 - Journal article
C2 - 31305569
AN - SCOPUS:85069565284
SN - 0146-9592
VL - 44
SP - 3546
EP - 3549
JO - Optics Letters
JF - Optics Letters
IS - 14
ER -