Fabrication of submicron structures in nanoparticle/polymer composite by holographic lithography and reactive ion etching

Aping Zhang, Sailing He, Kyoung Tae Kim, Yong Kyu Yoon, Ryszard Burzynski, Marek Samoc, Paras N. Prasad

Research output: Journal article publicationJournal articleAcademic researchpeer-review

6 Citations (Scopus)

Abstract

We report on the fabrication of nanoparticle/polymer submicron structures by combining holographic lithography and reactive ion etching. Silica nanoparticles are uniformly dispersed in a (SU8) polymer matrix at a high concentration, and in situ polymerization (cross-linking) is used to form a nanoparticle/polymer composite. Another photosensitive SU8 layer cast upon the nanoparticle/SU8 composite layer is structured through holographic lithography, whose pattern is finally transferred to the nanoparticle/SU8 layer by the reactive ion etching process. Honeycomb structures in a submicron scale are experimentally realized in the nanoparticle/SU8 composite.
Original languageEnglish
Article number203509
JournalApplied Physics Letters
Volume93
Issue number20
DOIs
Publication statusPublished - 2 Dec 2008
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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