Soft X-ray CZP (condenser zone plates) with three kinds of parameters have been fabricated by holograph-ion beam etching technique. The main processing steps include the fabrication of substrate, holographic lithography, ion beam etching, and gluing the support ring. The main parameters of the CZP were given. These three kinds of CZP have been used in the soft X ray microscopy experiments which act in combination with a pinhole as a linear monochromator.
|Number of pages||3|
|Journal||Guangxue Xuebao/Acta Optica Sinica|
|Publication status||Published - 1 Aug 1995|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics