Fabrication of soft X-ray condenser zone plates

Shaojun Fu, Yilin Hong, Xiaoming Tao, Yonggang Su

Research output: Journal article publicationJournal articleAcademic researchpeer-review

4 Citations (Scopus)

Abstract

Soft X-ray CZP (condenser zone plates) with three kinds of parameters have been fabricated by holograph-ion beam etching technique. The main processing steps include the fabrication of substrate, holographic lithography, ion beam etching, and gluing the support ring. The main parameters of the CZP were given. These three kinds of CZP have been used in the soft X ray microscopy experiments which act in combination with a pinhole as a linear monochromator.

Original languageEnglish
Pages (from-to)1148-1150
Number of pages3
JournalGuangxue Xuebao/Acta Optica Sinica
Volume15
Issue number8
Publication statusPublished - 1 Aug 1995

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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