Fabrication of silicon nanopillar-based nanocapacitor arrays

Shih Wei Chang, Jihun Oh, Steven Tyler Boles, Carl V. Thompson

Research output: Journal article publicationJournal articleAcademic researchpeer-review

61 Citations (Scopus)

Abstract

We report the fabrication of silicon nanopillar-based nanocapacitor arrays using metal-assisted etching in conjunction with electrodeposition. The high aspect ratio made possible by the catalyzed etching provides for an increased effective electrode area and hence a significant improvement in the capacitance density. Electroplated Ni electrode forms a conformal layer over the silicon nanopillars. Capacitance measurements show the expected trend as a function of pillar height and array period. The fabrication approach is simple, compatible with integration into standard silicon technology, and easily scalable.
Original languageEnglish
Article number153108
JournalApplied Physics Letters
Volume96
Issue number15
DOIs
Publication statusPublished - 12 Apr 2010
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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