Fabrication of silica-on-silicon waveguide devices by PECVD

S. F. Lin, J. P. Hou, C. H. Chiu, J. Y. Lin, T. C. Chu, D. P. Tsai, A. K. Chu

Research output: Journal article publicationConference articleAcademic researchpeer-review

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Keyphrases

Material Science

Physics