Fabrication of self-supporting transmission gratings for plasma diagnostics

Xiangdong Xu, Yilin Hong, Yangchao Tian, Tonglin Huo, Hongjun Zhou, Xiaoming Tao, Shiping Jiang, Shaojun Fu

Research output: Journal article publicationConference articleAcademic researchpeer-review

10 Citations (Scopus)

Abstract

With holographic-ion beam etching technique, a number of self-supporting transmission gratings (SSTGs) have been fabricated for inertial confinement fusion (ICF) diagnosis. In addition to the general process, a practical method for monitoring the evolution of the grating structures exposed in photoresist during development of the resist. The real-time monitor technique developed here is relatively simple in comparison with a He-Ne laser and detector, which needs delicate control.
Original languageEnglish
Pages (from-to)380-385
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3766
Publication statusPublished - 1 Dec 1999
Externally publishedYes
EventProceedings of the 1999 X-Ray Optics, Instruments, and Missions II - Denver, CO, United States
Duration: 18 Jul 199920 Jul 1999

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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