Fabrication of self-supporting transmission gratings for plasma diagnostics

Xiangdong Xu; Yilin Hong; Yangchao Tian; Tonglin Huo; Hongjun Zhou; Xiaoming Tao; Shiping Jiang; Shaojun Fu

Fabrication of self-supporting transmission gratings for plasma diagnostics

Xiangdong Xu, Yilin Hong, Yangchao Tian, Tonglin Huo, Hongjun Zhou, Xiaoming Tao, Shiping Jiang, Shaojun Fu

Research output: Journal article publication › Conference article › Academic research › peer-review

Abstract

With holographic-ion beam etching technique, a number of self-supporting transmission gratings (SSTGs) have been fabricated for inertial confinement fusion (ICF) diagnosis. In addition to the general process, a practical method for monitoring the evolution of the grating structures exposed in photoresist during development of the resist. The real-time monitor technique developed here is relatively simple in comparison with a He-Ne laser and detector, which needs delicate control.

Original language	English
Pages (from-to)	380-385
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3766
Publication status	Published - 1 Dec 1999
Externally published	Yes
Event	Proceedings of the 1999 X-Ray Optics, Instruments, and Missions II - Denver, CO, United States Duration: 18 Jul 1999 → 20 Jul 1999

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

Cite this

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title = "Fabrication of self-supporting transmission gratings for plasma diagnostics",

abstract = "With holographic-ion beam etching technique, a number of self-supporting transmission gratings (SSTGs) have been fabricated for inertial confinement fusion (ICF) diagnosis. In addition to the general process, a practical method for monitoring the evolution of the grating structures exposed in photoresist during development of the resist. The real-time monitor technique developed here is relatively simple in comparison with a He-Ne laser and detector, which needs delicate control.",

author = "Xiangdong Xu and Yilin Hong and Yangchao Tian and Tonglin Huo and Hongjun Zhou and Xiaoming Tao and Shiping Jiang and Shaojun Fu",

year = "1999",

month = dec,

day = "1",

language = "English",

volume = "3766",

pages = "380--385",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Proceedings of the 1999 X-Ray Optics, Instruments, and Missions II ; Conference date: 18-07-1999 Through 20-07-1999",

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TY - JOUR

T1 - Fabrication of self-supporting transmission gratings for plasma diagnostics

AU - Xu, Xiangdong

AU - Hong, Yilin

AU - Tian, Yangchao

AU - Huo, Tonglin

AU - Zhou, Hongjun

AU - Tao, Xiaoming

AU - Jiang, Shiping

AU - Fu, Shaojun

PY - 1999/12/1

Y1 - 1999/12/1

N2 - With holographic-ion beam etching technique, a number of self-supporting transmission gratings (SSTGs) have been fabricated for inertial confinement fusion (ICF) diagnosis. In addition to the general process, a practical method for monitoring the evolution of the grating structures exposed in photoresist during development of the resist. The real-time monitor technique developed here is relatively simple in comparison with a He-Ne laser and detector, which needs delicate control.

AB - With holographic-ion beam etching technique, a number of self-supporting transmission gratings (SSTGs) have been fabricated for inertial confinement fusion (ICF) diagnosis. In addition to the general process, a practical method for monitoring the evolution of the grating structures exposed in photoresist during development of the resist. The real-time monitor technique developed here is relatively simple in comparison with a He-Ne laser and detector, which needs delicate control.

UR - http://www.scopus.com/inward/record.url?scp=0033327268&partnerID=8YFLogxK

M3 - Conference article

SN - 0277-786X

VL - 3766

SP - 380

EP - 385

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Proceedings of the 1999 X-Ray Optics, Instruments, and Missions II

Y2 - 18 July 1999 through 20 July 1999

ER -

Fabrication of self-supporting transmission gratings for plasma diagnostics

Abstract

ASJC Scopus subject areas

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