Fabrication of Polymer Optical Waveguides by Digital Ultraviolet Lithography

Keyphrases

• Ultraviolet Lithography 100%
• Polymer Optical Waveguide 100%
• Waveguide 66%
• Grayscale 66%
• Lithography Technology 66%
• Power Splitter 66%
• Exposure Dose 33%
• Multimode Interference 33%
• Light Scattering 33%
• Gaussian Distribution 33%
• Optical Waveguides 33%
• Bending Loss 33%
• Multi-mode 33%
• Quadratic Forms 33%
• Proximity Effect 33%
• Rapid Manufacturing 33%
• Transition Zone 33%
• Biosensing 33%
• Propagation Loss 33%
• Polymer Characterization 33%
• Nonlinear Compensation 33%
• Interference Power 33%
• Microring Resonator 33%
• Polymer Waveguides 33%
• Y-branch 33%
• Polymer Waveguide Devices 33%
• Lithography Process 33%
• Subpattern 33%
• Dose Map 33%
• All-digital 33%

Material Science

• Waveguide 100%
• Lithography 100%
• Resonator 14%