Fabrication of Polymer Optical Waveguide-Based Mach-Zehnder Interferometer Microsensors for Integrated Optofluidic Biodetection

Han Wang, Zhituo Chen, Taige Li, Yaocheng Shi, A. Ping Zhang

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

We demonstrate an integrated optofluidic chip with polymer optical Mach-Zehnder interferometer microsensors. A digital ultraviolet lithography is applied to fabricate high-quality polymer optical waveguide components and Mach-Zehnder interferometer microsensors for on-chip integrated label-free biodetection.

Original languageEnglish
Title of host publicationOptical Sensors
Subtitle of host publicationProceedings Optica Sensing Congress 2023, AIS, FTS, HISE, Sensors, ES 2023
PublisherOptical Society of America
ISBN (Electronic)9781957171241
DOIs
Publication statusPublished - Jul 2023
EventOptica Sensing Congress 2023, AIS, FTS, HISE, Sensors, ES 2023 - Part of Optical Sensors and Sensing Congress 2023 - Munich, Germany
Duration: 30 Jul 20233 Aug 2023

Publication series

NameOptical Sensors: Proceedings Optica Sensing Congress 2023, AIS, FTS, HISE, Sensors, ES 2023

Conference

ConferenceOptica Sensing Congress 2023, AIS, FTS, HISE, Sensors, ES 2023 - Part of Optical Sensors and Sensing Congress 2023
Country/TerritoryGermany
CityMunich
Period30/07/233/08/23

ASJC Scopus subject areas

  • General Computer Science
  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Space and Planetary Science
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Instrumentation

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