Fabrication of plasmonic devices using femtosecond laser-induced forward transfer technique

M.L. Tseng, C.M. Chang, B.H. Chen, Y.-W. Huang, C.H. Chu, K.S. Chung, Y.J. Liu, H.G. Tsai, N.-N. Chu, D.-W. Huang, H.-P. Chiang, Din-ping Tsai

Research output: Journal article publicationJournal articleAcademic researchpeer-review

23 Citations (Scopus)


Using femtosecond laser-induced forward transfer techniques we have fabricated gold dots and nanoparticles on glass substrates, as well as nanobumps on gold thin film. The surface morphologies of these structures with different laser fluences and film thicknesses are investigated. We also study the focusing and defocusing properties of the nanofence - an arranged nanobump pattern - by the total-internal reflection microscope. Observations reveal that surface plasmon waves can be highly directed and focused via this nanofence pattern. Results are in good agreement with the simulation results using the finite-element method and demonstrate the potential applications of these nanophotonic devices. Furthermore, we utilize high laser energy to fabricate plasmonic waveguides, and also succeed in transferring the waveguides to another substrate. The attenuation rates of the light propagating in the waveguides are observed to achieve 0.31dB?m 1 and 0.48dB?m 1 on the target and receiver sides, respectively. © 2012 IOP Publishing Ltd.
Original languageEnglish
Article number444013
Issue number44
Publication statusPublished - 9 Nov 2012
Externally publishedYes

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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