Fabrication of phase-change Ge2Sb2Te5 nano-rings

C.H. Chu, M.L. Tseng, C. Da Shiue, S.W. Chen, H.-P. Chiang, M. Mansuripur, Din-ping Tsai

Research output: Journal article publicationJournal articleAcademic researchpeer-review

19 Citations (Scopus)

Abstract

Phase-change material Ge2Sb2Te5 rings with nanometer-scale thickness have been fabricated using the photo-thermal effect of a focused laser beam followed by differential chemical etching. Laser irradiation conditions and etching process parameters are varied to control the geometric characteristics of the rings. We demonstrate the possibility of arranging the rings in specific geometric patterns, and also their release from the original substrate. © 2011 Optical Society of America.
Original languageEnglish
Pages (from-to)12652-12657
Number of pages6
JournalOptics Express
Volume19
Issue number13
DOIs
Publication statusPublished - 20 Jun 2011
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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