Fabrication of phase-change Ge2Sb2Te5 nano-rings

C.H. Chu; M.L. Tseng; C. Da Shiue; S.W. Chen; H.-P. Chiang; M. Mansuripur; Din-ping Tsai

doi:10.1364/OE.19.012652

Fabrication of phase-change Ge2Sb2Te5 nano-rings

C.H. Chu, M.L. Tseng, C. Da Shiue, S.W. Chen, H.-P. Chiang, M. Mansuripur, Din-ping Tsai

Research output: Journal article publication › Journal article › Academic research › peer-review

25 Citations (Scopus)

Abstract

Phase-change material Ge2Sb2Te5 rings with nanometer-scale thickness have been fabricated using the photo-thermal effect of a focused laser beam followed by differential chemical etching. Laser irradiation conditions and etching process parameters are varied to control the geometric characteristics of the rings. We demonstrate the possibility of arranging the rings in specific geometric patterns, and also their release from the original substrate. © 2011 Optical Society of America.

Original language	English
Pages (from-to)	12652-12657
Number of pages	6
Journal	Optics Express
Volume	19
Issue number	13
DOIs	https://doi.org/10.1364/OE.19.012652
Publication status	Published - 20 Jun 2011
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

More information

10.1364/OE.19.012652

Cite this

@article{2976ec21289741fd8f44a32d3b2a6161,

title = "Fabrication of phase-change Ge2Sb2Te5 nano-rings",

abstract = "Phase-change material Ge2Sb2Te5 rings with nanometer-scale thickness have been fabricated using the photo-thermal effect of a focused laser beam followed by differential chemical etching. Laser irradiation conditions and etching process parameters are varied to control the geometric characteristics of the rings. We demonstrate the possibility of arranging the rings in specific geometric patterns, and also their release from the original substrate. {\textcopyright} 2011 Optical Society of America.",

author = "C.H. Chu and M.L. Tseng and {Da Shiue}, C. and S.W. Chen and H.-P. Chiang and M. Mansuripur and Din-ping Tsai",

year = "2011",

month = jun,

day = "20",

doi = "10.1364/OE.19.012652",

language = "English",

volume = "19",

pages = "12652--12657",

journal = "Optics Express",

issn = "1094-4087",

publisher = "The Optical Society",

number = "13",

}

TY - JOUR

T1 - Fabrication of phase-change Ge2Sb2Te5 nano-rings

AU - Chu, C.H.

AU - Tseng, M.L.

AU - Da Shiue, C.

AU - Chen, S.W.

AU - Chiang, H.-P.

AU - Mansuripur, M.

AU - Tsai, Din-ping

PY - 2011/6/20

Y1 - 2011/6/20

N2 - Phase-change material Ge2Sb2Te5 rings with nanometer-scale thickness have been fabricated using the photo-thermal effect of a focused laser beam followed by differential chemical etching. Laser irradiation conditions and etching process parameters are varied to control the geometric characteristics of the rings. We demonstrate the possibility of arranging the rings in specific geometric patterns, and also their release from the original substrate. © 2011 Optical Society of America.

AB - Phase-change material Ge2Sb2Te5 rings with nanometer-scale thickness have been fabricated using the photo-thermal effect of a focused laser beam followed by differential chemical etching. Laser irradiation conditions and etching process parameters are varied to control the geometric characteristics of the rings. We demonstrate the possibility of arranging the rings in specific geometric patterns, and also their release from the original substrate. © 2011 Optical Society of America.

UR - http://www.scopus.com/inward/record.url?scp=79959420557&partnerID=8YFLogxK

U2 - 10.1364/OE.19.012652

DO - 10.1364/OE.19.012652

M3 - Journal article

SN - 1094-4087

VL - 19

SP - 12652

EP - 12657

JO - Optics Express

JF - Optics Express

IS - 13

ER -

Fabrication of phase-change Ge2Sb2Te5 nano-rings

Abstract

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this