Fabrication of phase-change chalcogenide Ge2Sb 2Te5 patterns by laser-induced forward transfer

Femtosecond laser pulses are focused on a thin film of Ge 2Sb2Te5 phase-change material, and the transfer of the illuminated material to a nearby substrate is investigated. The size, shape, and phase-state of the fabricated pattern can be effectively controlled by the laser fluence and by the thickness of the Ge2Sb2Te5 film. Results show multi-level electrical and optical reflection states of the fabricated patterns, which may provide a simple and efficient foundation for patterning future phase-change devices. © 2011 Optical Society of America.