Fabrication of nano-scaled patterns on ceramic thin films and silicon substrates by soft ultraviolet nanoimprint lithography

K. L. Jim, F. K. Lee, J. Z. Xin, Chi Wah Leung, H. L W Chan, Y. Chen

Research output: Journal article publicationJournal articleAcademic researchpeer-review

15 Citations (Scopus)

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Material Science