Fabrication of microchannels on silica glass by femtosecond laser multi-scan: From surface generation mechanism to morphology control

Keyphrases

• Surface Roughness 100%
• Surface Generation Mechanism 100%
• Morphology Control 100%
• Femtosecond Laser 100%
• Silica Glass 100%
• Multi-scan 100%
• Sidewall 66%
• Physical Properties 33%
• Chemical Properties 33%
• Optimization Methods 33%
• Brittle Materials 33%
• Hard Materials 33%
• Processing Parameters 33%
• Device Application 33%
• Scanning Approach 33%
• Microfabrication 33%
• Critical Methodology 33%
• Cross-sectional Profile 33%
• Microfluidic Device 33%
• Precision Control 33%
• Comprehensive Optimization 33%
• Taper Angle 33%
• Femtosecond Laser Processing 33%
• Rectangular Microchannel 33%
• Scanning Mode 33%
• Microfluidic Devices Fabrication 33%
• Laser Scanning Path 33%

Engineering

• Microchannel 100%
• Femtosecond Laser 100%
• Fused Silica 100%
• Side Wall 40%
• Microfluidic Device 40%
• Optimization Method 20%
• Processing Parameter 20%
• Hard Material 20%
• Taper Angle 20%
• Microfabrication 20%
• Laser Processing 20%
• Rectangular Microchannel 20%
• Brittleness 20%

Material Science

• Surface Roughness 100%
• Surface (Surface Science) 100%
• Silicon Dioxide 100%
• Composite Material 33%
• Laser Processing 33%
• Device Fabrication 33%
• Microfabrication 33%
• Physical Property 33%
• Chemical Property 33%
• Brittleness 33%