Fabrication of inorganic GeO2:SiO2channel waveguides by ultraviolet imprinting technique

Rajni, K. Pita, Siu Fung Yu, S. C. Tjin, C. H. Kam

Research output: Journal article publicationJournal articleAcademic researchpeer-review

7 Citations (Scopus)

Abstract

The authors demonstrate the effective waveguiding channel formation inside an ∼3 μm thick photosensitive GeO2(20%):SiO2(80%) planar slab waveguide film prepared using the sol-gel technique by the direct ultraviolet (UV) imprinting technique. This is possible because of the ability to induce large refractive index change (∼10-3) in the films by the UV radiation. Channel waveguides with various refractive index values have been fabricated. The measured modal profiles of the waveguides match well with the simulation results. The simplicity of the direct UV imprinting technique is also shown by the fabrication of a 1 × 2 multimode-interference 3 dB light splitter in one single processing step.
Original languageEnglish
Article number071105
JournalApplied Physics Letters
Volume89
Issue number7
DOIs
Publication statusPublished - 25 Aug 2006
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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