TY - JOUR
T1 - Fabrication of high-aspect-ratio and hierarchical micro/nanostructure arrays by a novel piezoelectrically actuated cutting system
AU - Du, Hanheng
AU - Zhu, Zhiwei
AU - Wang, Zuankai
AU - To, Suet
N1 - Funding Information:
This work was funded by the Research Grants Council of the Hong Kong Special Administrative Region, China (Project No.: PolyU 15221322), the National Natural Science Foundation of China (Project No.: U19A20104), and State Key Laboratory of Ultra-precision Machining Technology.
Publisher Copyright:
© 2023 The Author(s)
PY - 2023/2
Y1 - 2023/2
N2 - Micro/nanostructure arrays have been broadly applied in numerous industrial fields, such as optics, antibacterial fields, and anti-corrosion. However, the highly efficient fabrication of micro/nanostructure arrays, especially the high-aspect-ratio and hierarchical micro/nanostructure arrays, remains a challenge. Motivated by this, the study designs a novel piezoelectrically actuated (PA) cutting system for fabricating this kind of micro/nanostructure array. First, the mechanical structure of the PA cutting system is designed based on the circular flexure hinge. Then, a finite element model is established to analyze its resonant frequencies and mode shapes. Next, to determine the working performances of the PA cutting system, a performance test platform is built. Finally, various micro/nanostructure arrays with two features of the high-aspect-ratio and the multilayer are fabricated, demonstrating the effectiveness and flexibility of the PA cutting system. Besides, the function of machined micro/nanostructure arrays about the corrosion property was investigated. This study provides a new approach for fabricating high-aspect-ratio and hierarchical micro/nanostructure arrays, which can be applied in industrial manufacturing and corrosion protection fields.
AB - Micro/nanostructure arrays have been broadly applied in numerous industrial fields, such as optics, antibacterial fields, and anti-corrosion. However, the highly efficient fabrication of micro/nanostructure arrays, especially the high-aspect-ratio and hierarchical micro/nanostructure arrays, remains a challenge. Motivated by this, the study designs a novel piezoelectrically actuated (PA) cutting system for fabricating this kind of micro/nanostructure array. First, the mechanical structure of the PA cutting system is designed based on the circular flexure hinge. Then, a finite element model is established to analyze its resonant frequencies and mode shapes. Next, to determine the working performances of the PA cutting system, a performance test platform is built. Finally, various micro/nanostructure arrays with two features of the high-aspect-ratio and the multilayer are fabricated, demonstrating the effectiveness and flexibility of the PA cutting system. Besides, the function of machined micro/nanostructure arrays about the corrosion property was investigated. This study provides a new approach for fabricating high-aspect-ratio and hierarchical micro/nanostructure arrays, which can be applied in industrial manufacturing and corrosion protection fields.
KW - Cutting system
KW - Finite element analysis
KW - Micro/nanostructure array
KW - Piezoelectric actuator
KW - Ultraprecision machining
KW - Vibration-assisted machining
UR - http://www.scopus.com/inward/record.url?scp=85147416716&partnerID=8YFLogxK
U2 - 10.1016/j.matdes.2023.111660
DO - 10.1016/j.matdes.2023.111660
M3 - Journal article
AN - SCOPUS:85147416716
SN - 0264-1275
VL - 226
JO - Materials and Design
JF - Materials and Design
M1 - 111660
ER -