Fabrication of c-axis oriented potassium-doped Sr0.6Ba0.4Nb2O6thin films on Si substrates by pulsed laser deposition method

Z. R. Shen, H. Ye, Chee Leung Mak, T. Y. Yum, K. H. Wong

Research output: Journal article publicationJournal articleAcademic researchpeer-review

16 Citations (Scopus)

Abstract

Potassium-doped strontium barium niobate (SBN) thin films have been fabricated directly on p-type (100)Si substrates using pulsed laser deposition method. The presence of potassium ions and the use of appropriate oxygen pressure help to produce c-axis oriented SBN films. Post-annealing at high temperature also enhances the formation of tetragonal tungsten-bronze phase SBN. Excellent guided mode propagation for 632 nm wavelength radiation has been demonstrated. On the basis of our studies, we have shown that highly c-axis oriented SBN films grown directly on (100)Si substrates can be achieved and SBN is a suitable material for developing integrated electro-optic devices.
Original languageEnglish
Pages (from-to)3475-3479
Number of pages5
JournalThin Solid Films
Volume515
Issue number7-8
DOIs
Publication statusPublished - 26 Feb 2007

Keywords

  • Orientation
  • Oxygen pressure
  • Post-annealing process
  • Potassium ion

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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