Experimental studies on A micromanipulator for micro/nano manipulation

Qingsong Xu; Yangmin Li

doi:10.1109/APCCAS.2008.4746133

Experimental studies on A micromanipulator for micro/nano manipulation

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate for the hysteresis and creep of the piezoelectric actuator. In view of the relative long control interval, a feedforward controller is then designed to implement a zero phase error tracking control (ZPETC). The positioning performances of the micromanipulator in terms of resolution, accuracy and repeatability, and tracking performances of 1-D and 2-D motion have been tested by several experimental studies. The experimental results show that the developed micromanipulator is sufficient for micro-positioning, whereas its tracking performances are expected to be further improved.

Original language	English
Title of host publication	Proceedings of APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems
Pages	754-757
Number of pages	4
DOIs	https://doi.org/10.1109/APCCAS.2008.4746133
Publication status	Published - 1 Dec 2008
Externally published	Yes
Event	APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems - Macao, China Duration: 30 Nov 2008 → 3 Dec 2008

Conference

Conference	APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems
Country/Territory	China
City	Macao
Period	30/11/08 → 3/12/08

ASJC Scopus subject areas

Electrical and Electronic Engineering

More information

10.1109/APCCAS.2008.4746133

Cite this

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title = "Experimental studies on A micromanipulator for micro/nano manipulation",

abstract = "This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate for the hysteresis and creep of the piezoelectric actuator. In view of the relative long control interval, a feedforward controller is then designed to implement a zero phase error tracking control (ZPETC). The positioning performances of the micromanipulator in terms of resolution, accuracy and repeatability, and tracking performances of 1-D and 2-D motion have been tested by several experimental studies. The experimental results show that the developed micromanipulator is sufficient for micro-positioning, whereas its tracking performances are expected to be further improved.",

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AB - This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate for the hysteresis and creep of the piezoelectric actuator. In view of the relative long control interval, a feedforward controller is then designed to implement a zero phase error tracking control (ZPETC). The positioning performances of the micromanipulator in terms of resolution, accuracy and repeatability, and tracking performances of 1-D and 2-D motion have been tested by several experimental studies. The experimental results show that the developed micromanipulator is sufficient for micro-positioning, whereas its tracking performances are expected to be further improved.

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BT - Proceedings of APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems

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Experimental studies on A micromanipulator for micro/nano manipulation

Abstract

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