Experimental studies on A micromanipulator for micro/nano manipulation

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate for the hysteresis and creep of the piezoelectric actuator. In view of the relative long control interval, a feedforward controller is then designed to implement a zero phase error tracking control (ZPETC). The positioning performances of the micromanipulator in terms of resolution, accuracy and repeatability, and tracking performances of 1-D and 2-D motion have been tested by several experimental studies. The experimental results show that the developed micromanipulator is sufficient for micro-positioning, whereas its tracking performances are expected to be further improved.
Original languageEnglish
Title of host publicationProceedings of APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems
Pages754-757
Number of pages4
DOIs
Publication statusPublished - 1 Dec 2008
Externally publishedYes
EventAPCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems - Macao, China
Duration: 30 Nov 20083 Dec 2008

Conference

ConferenceAPCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems
CountryChina
CityMacao
Period30/11/083/12/08

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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