Experimental studies on A micromanipulator for micro/nano manipulation

Qingsong Xu; Yangmin Li

doi:10.1109/APCCAS.2008.4746133

Experimental studies on A micromanipulator for micro/nano manipulation

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate for the hysteresis and creep of the piezoelectric actuator. In view of the relative long control interval, a feedforward controller is then designed to implement a zero phase error tracking control (ZPETC). The positioning performances of the micromanipulator in terms of resolution, accuracy and repeatability, and tracking performances of 1-D and 2-D motion have been tested by several experimental studies. The experimental results show that the developed micromanipulator is sufficient for micro-positioning, whereas its tracking performances are expected to be further improved.

Original language	English
Title of host publication	Proceedings of APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems
Pages	754-757
Number of pages	4
DOIs	https://doi.org/10.1109/APCCAS.2008.4746133
Publication status	Published - 1 Dec 2008
Externally published	Yes
Event	APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems - Macao, China Duration: 30 Nov 2008 → 3 Dec 2008

Conference

Conference	APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems
Country/Territory	China
City	Macao
Period	30/11/08 → 3/12/08

ASJC Scopus subject areas

Electrical and Electronic Engineering

More information

10.1109/APCCAS.2008.4746133

Cite this

@inproceedings{29146831c77e4e02a667317c5d7bfc60,

title = "Experimental studies on A micromanipulator for micro/nano manipulation",

abstract = "This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate for the hysteresis and creep of the piezoelectric actuator. In view of the relative long control interval, a feedforward controller is then designed to implement a zero phase error tracking control (ZPETC). The positioning performances of the micromanipulator in terms of resolution, accuracy and repeatability, and tracking performances of 1-D and 2-D motion have been tested by several experimental studies. The experimental results show that the developed micromanipulator is sufficient for micro-positioning, whereas its tracking performances are expected to be further improved.",

author = "Qingsong Xu and Yangmin Li",

year = "2008",

month = dec,

day = "1",

doi = "10.1109/APCCAS.2008.4746133",

language = "English",

isbn = "9781424423422",

pages = "754--757",

booktitle = "Proceedings of APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems",

note = "APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems ; Conference date: 30-11-2008 Through 03-12-2008",

}

TY - GEN

T1 - Experimental studies on A micromanipulator for micro/nano manipulation

AU - Xu, Qingsong

AU - Li, Yangmin

PY - 2008/12/1

Y1 - 2008/12/1

N2 - This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate for the hysteresis and creep of the piezoelectric actuator. In view of the relative long control interval, a feedforward controller is then designed to implement a zero phase error tracking control (ZPETC). The positioning performances of the micromanipulator in terms of resolution, accuracy and repeatability, and tracking performances of 1-D and 2-D motion have been tested by several experimental studies. The experimental results show that the developed micromanipulator is sufficient for micro-positioning, whereas its tracking performances are expected to be further improved.

AB - This paper presents an experiment-based study on an XY micromanipulator to achieve a sub-micron resolution for micro/nano scale manipulation. The micromanipulator is designed with both input and output decoupling properties, which allows the adoption of a SISO controller for the micromanipulation system. Based on the system identification, a digital lag-lead feedback controller is designed to compensate for the hysteresis and creep of the piezoelectric actuator. In view of the relative long control interval, a feedforward controller is then designed to implement a zero phase error tracking control (ZPETC). The positioning performances of the micromanipulator in terms of resolution, accuracy and repeatability, and tracking performances of 1-D and 2-D motion have been tested by several experimental studies. The experimental results show that the developed micromanipulator is sufficient for micro-positioning, whereas its tracking performances are expected to be further improved.

UR - http://www.scopus.com/inward/record.url?scp=62949170057&partnerID=8YFLogxK

U2 - 10.1109/APCCAS.2008.4746133

DO - 10.1109/APCCAS.2008.4746133

M3 - Conference article published in proceeding or book

SN - 9781424423422

SP - 754

EP - 757

BT - Proceedings of APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems

T2 - APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems

Y2 - 30 November 2008 through 3 December 2008

ER -

Experimental studies on A micromanipulator for micro/nano manipulation

Abstract

Conference

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this