Experimental research on ultra-smooth surface polishing based on two-dimensional vibration of liquid

Z. N. Guo; X. Z. Huang; Z. G. Huang; Z. Q. Yu; Tai Man Yue; Wing Bun Lee

doi:10.4028/0-87849-416-2.219

Experimental research on ultra-smooth surface polishing based on two-dimensional vibration of liquid

Z. N. Guo, X. Z. Huang, Z. G. Huang, Z. Q. Yu, Tai Man Yue, Wing Bun Lee

Research output: Journal article publication › Journal article › Academic research › peer-review

2 Citations (Scopus)

Abstract

Experiment research of polishing based on liquid two-dimension vibration is carried out by a vibrating device which is driven by ultrasonic source and can produce coupling vibrations of liquid. Sound pressures of some key points in water are tested by hydrophone and translated into sound intensity to evaluate the effect of input voltage of transducer. It is analyzed which vibration state of fluid field and the way that workpiece is clamped is the best for the polishing. Polishing results of quartz glass are evaluated by the use of region-track measure method, and some polishing rules are presented.

Original language	English
Pages (from-to)	219-224
Number of pages	6
Journal	Key Engineering Materials
Volume	329
DOIs	https://doi.org/10.4028/0-87849-416-2.219
Publication status	Published - 24 Jan 2007

Keywords

Polishing
Sound intensity
Ultra-smooth surface
Ultrasonic vibration

ASJC Scopus subject areas

Ceramics and Composites
Chemical Engineering (miscellaneous)

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10.4028/0-87849-416-2.219

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AU - Guo, Z. N.

AU - Huang, X. Z.

AU - Huang, Z. G.

AU - Yu, Z. Q.

AU - Yue, Tai Man

AU - Lee, Wing Bun

PY - 2007/1/24

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AB - Experiment research of polishing based on liquid two-dimension vibration is carried out by a vibrating device which is driven by ultrasonic source and can produce coupling vibrations of liquid. Sound pressures of some key points in water are tested by hydrophone and translated into sound intensity to evaluate the effect of input voltage of transducer. It is analyzed which vibration state of fluid field and the way that workpiece is clamped is the best for the polishing. Polishing results of quartz glass are evaluated by the use of region-track measure method, and some polishing rules are presented.

KW - Polishing

KW - Sound intensity

KW - Ultra-smooth surface

KW - Ultrasonic vibration

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JO - Key Engineering Materials

JF - Key Engineering Materials

ER -

Experimental research on ultra-smooth surface polishing based on two-dimensional vibration of liquid

Abstract

Keywords

ASJC Scopus subject areas

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