Experimental and theoretical analysis of argon plasma-enhanced quantum-well intermixing

H. S. Djie, T. Mei, J. Arokiaraj, C. Sookdhis, Siu Fung Yu, L. K. Ang, X. H. Tang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

31 Citations (Scopus)

Abstract

Plasma-enhanced quantum-well intermixing (QWI) has been developed for tuning the bandgap of InGaAs-InP material using an inductively coupled plasma system. The application of inductively coupled plasma enhances the interdiffusion of point defects resulting in a higher degree of intermixing. Based on a semi-empirical model of QW interdiffusion, the bandgap blue-shift with respect to the plasma exposure time and inductively coupled plasma energy has been analyzed. The theoretical results appear to be in good agreement with the experimental data of the intermixed samples. The model serves as a good simulation tool to explain the intermixing mechanism and further to optimize the intermixing process for the fabrication of the photonic integrated circuits.
Original languageEnglish
Pages (from-to)166-174
Number of pages9
JournalIEEE Journal of Quantum Electronics
Volume40
Issue number2
DOIs
Publication statusPublished - 1 Feb 2004
Externally publishedYes

Keywords

  • Inductively coupled plasma
  • Photonic integrated circuits
  • Quantum well
  • Quantum-well intermixing (QWI)

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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