SrTi O3 thin films have been deposited on Si (001) wafers by laser molecular beam epitaxy using an ultrathin Sr layer as the template. X-ray diffraction measurements indicated that SrTi O3 was well crystallized and epitaxially aligned with Si. Cross-sectional observations in a transmission electron microscope revealed that the SrTi O3 Si interface was sharp, smooth, and fully crystallized. The thickness of the Sr template was found to be a critical factor that influenced the quality of SrTi O3 and the interfacial structure. Electrical measurements revealed that the SrTi O3 film was highly resistive.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)