Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack
- P. S. Lee
- , D. Mangelinck
- , K. L. Pey
- , J. Ding
- , D. Z. Chi
- , T. Osipowicz
- , Jiyan Dai
- , A. See
Research output: Journal article publication › Conference article › Academic research › peer-review
23
Link opens in a new tab
Citations
(Scopus)