Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack

  • P. S. Lee
  • , D. Mangelinck
  • , K. L. Pey
  • , J. Ding
  • , D. Z. Chi
  • , T. Osipowicz
  • , Jiyan Dai
  • , A. See

Research output: Journal article publicationConference articleAcademic researchpeer-review

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