Enhanced ferroelectric polarization with less wake-up effect and improved endurance of Hf0.5Zr0.5O2 thin films by implementing W electrode

Dao Wang; Yan Zhang; Jiali Wang; Chunlai Luo; Ming Li; Wentao Shuai; Ruiqiang Tao; Zhen Fan; Deyang Chen; Min Zeng; Jiyan Y. Dai; Xubing B. Lu; J. M. Liu

doi:10.1016/j.jmst.2021.07.016

Enhanced ferroelectric polarization with less wake-up effect and improved endurance of Hf_0.5Zr_0.5O₂ thin films by implementing W electrode

Dao Wang, Yan Zhang, Jiali Wang, Chunlai Luo, Ming Li, Wentao Shuai, Ruiqiang Tao, Zhen Fan, Deyang Chen, Min Zeng, Jiyan Y. Dai, Xubing B. Lu, J. M. Liu

Research output: Journal article publication › Journal article › Academic research › peer-review

37 Citations (Scopus)

Abstract

This paper reports the improvement of electrical, ferroelectric and endurance of Hf_0.5Zr_0.5O₂ (HZO) thin-film capacitors by implementing W electrode. The W/HZO/W capacitor shows excellent pristine 2P_r values of 45.1 μC/cm² at ±6 V, which are much higher than those of TiN/HZO/W (34.4 μC/cm²) and W/HZO/TiN (26.9 μC/cm²) capacitors. Notably, the maximum initial 2P_r value of W/HZO/W capacitor can reach as high as 57.9 μC/cm² at ±7.5 V. These strong ferroelectric polarization effects are ascribed to the W electrode with a fairly low thermal expansion coefficient which provides a larger in-plane tensile strain compared with TiN electrode, allowing for enhancement of o-phase formation. Moreover, the W/HZO/W capacitor also exhibits higher endurance, smaller wake-up effect (10.1%) and superior fatigue properties up to 1.5 × 10¹⁰cycles compared to the TiN/HZO/W and W/HZO/TiN capacitors. Such improvements of W/HZO/W capacitor are mainly due to the decreased leakage current by more than an order of magnitude compared to the W/HZO/TiN capacitor. These results demonstrate that capping electrode material plays an important role in the enhancement of o-phase formation, reduces oxygen vacancies, mitigates wake-up effect and improves reliability.

Original language	English
Pages (from-to)	1-7
Number of pages	7
Journal	Journal of Materials Science and Technology
Volume	104
DOIs	https://doi.org/10.1016/j.jmst.2021.07.016
Publication status	Published - 30 Mar 2022

Keywords

Endurance properties
Ferroelectric polarization
HfZrO films
Thermal expansion coefficient
W electrode

ASJC Scopus subject areas

Ceramics and Composites
Mechanics of Materials
Mechanical Engineering
Polymers and Plastics
Metals and Alloys
Materials Chemistry

More information

10.1016/j.jmst.2021.07.016

http://hdl.handle.net/10397/94994

Cite this

Wang, D., Zhang, Y., Wang, J., Luo, C., Li, M., Shuai, W., Tao, R., Fan, Z., Chen, D., Zeng, M., Dai, J. Y., Lu, X. B., & Liu, J. M. (2022). Enhanced ferroelectric polarization with less wake-up effect and improved endurance of Hf_0.5Zr_0.5O₂ thin films by implementing W electrode. Journal of Materials Science and Technology, 104, 1-7. https://doi.org/10.1016/j.jmst.2021.07.016

@article{14d7600ae90045639312a73a73a7f72f,

title = "Enhanced ferroelectric polarization with less wake-up effect and improved endurance of Hf0.5Zr0.5O2 thin films by implementing W electrode",

abstract = "This paper reports the improvement of electrical, ferroelectric and endurance of Hf0.5Zr0.5O2 (HZO) thin-film capacitors by implementing W electrode. The W/HZO/W capacitor shows excellent pristine 2Pr values of 45.1 μC/cm2 at ±6 V, which are much higher than those of TiN/HZO/W (34.4 μC/cm2) and W/HZO/TiN (26.9 μC/cm2) capacitors. Notably, the maximum initial 2Pr value of W/HZO/W capacitor can reach as high as 57.9 μC/cm2 at ±7.5 V. These strong ferroelectric polarization effects are ascribed to the W electrode with a fairly low thermal expansion coefficient which provides a larger in-plane tensile strain compared with TiN electrode, allowing for enhancement of o-phase formation. Moreover, the W/HZO/W capacitor also exhibits higher endurance, smaller wake-up effect (10.1%) and superior fatigue properties up to 1.5 × 1010cycles compared to the TiN/HZO/W and W/HZO/TiN capacitors. Such improvements of W/HZO/W capacitor are mainly due to the decreased leakage current by more than an order of magnitude compared to the W/HZO/TiN capacitor. These results demonstrate that capping electrode material plays an important role in the enhancement of o-phase formation, reduces oxygen vacancies, mitigates wake-up effect and improves reliability.",

keywords = "Endurance properties, Ferroelectric polarization, HfZrO films, Thermal expansion coefficient, W electrode",

author = "Dao Wang and Yan Zhang and Jiali Wang and Chunlai Luo and Ming Li and Wentao Shuai and Ruiqiang Tao and Zhen Fan and Deyang Chen and Min Zeng and Dai, {Jiyan Y.} and Lu, {Xubing B.} and Liu, {J. M.}",

note = "Funding Information: This work was financially supported by the National Natural Science Foundation of China (No. 51872099), the Hong Kong Research Grant Council (No. 15300619), and the Science and Technology Program of Guangzhou (No. 201905-0001), the Guangdong Science and Technology Project-International Cooperation (No. 2021A0505030064). Deyang Chen acknowledges the financial support by the Hong Kong Scholars Program (No. XJ2019006). Publisher Copyright: {\textcopyright} 2021",

year = "2022",

month = mar,

day = "30",

doi = "10.1016/j.jmst.2021.07.016",

language = "English",

volume = "104",

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journal = "Journal of Materials Science and Technology",

issn = "1005-0302",

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TY - JOUR

T1 - Enhanced ferroelectric polarization with less wake-up effect and improved endurance of Hf0.5Zr0.5O2 thin films by implementing W electrode

AU - Wang, Dao

AU - Zhang, Yan

AU - Wang, Jiali

AU - Luo, Chunlai

AU - Li, Ming

AU - Shuai, Wentao

AU - Tao, Ruiqiang

AU - Fan, Zhen

AU - Chen, Deyang

AU - Zeng, Min

AU - Dai, Jiyan Y.

AU - Lu, Xubing B.

AU - Liu, J. M.

N1 - Funding Information: This work was financially supported by the National Natural Science Foundation of China (No. 51872099), the Hong Kong Research Grant Council (No. 15300619), and the Science and Technology Program of Guangzhou (No. 201905-0001), the Guangdong Science and Technology Project-International Cooperation (No. 2021A0505030064). Deyang Chen acknowledges the financial support by the Hong Kong Scholars Program (No. XJ2019006). Publisher Copyright: © 2021

PY - 2022/3/30

Y1 - 2022/3/30

N2 - This paper reports the improvement of electrical, ferroelectric and endurance of Hf0.5Zr0.5O2 (HZO) thin-film capacitors by implementing W electrode. The W/HZO/W capacitor shows excellent pristine 2Pr values of 45.1 μC/cm2 at ±6 V, which are much higher than those of TiN/HZO/W (34.4 μC/cm2) and W/HZO/TiN (26.9 μC/cm2) capacitors. Notably, the maximum initial 2Pr value of W/HZO/W capacitor can reach as high as 57.9 μC/cm2 at ±7.5 V. These strong ferroelectric polarization effects are ascribed to the W electrode with a fairly low thermal expansion coefficient which provides a larger in-plane tensile strain compared with TiN electrode, allowing for enhancement of o-phase formation. Moreover, the W/HZO/W capacitor also exhibits higher endurance, smaller wake-up effect (10.1%) and superior fatigue properties up to 1.5 × 1010cycles compared to the TiN/HZO/W and W/HZO/TiN capacitors. Such improvements of W/HZO/W capacitor are mainly due to the decreased leakage current by more than an order of magnitude compared to the W/HZO/TiN capacitor. These results demonstrate that capping electrode material plays an important role in the enhancement of o-phase formation, reduces oxygen vacancies, mitigates wake-up effect and improves reliability.

AB - This paper reports the improvement of electrical, ferroelectric and endurance of Hf0.5Zr0.5O2 (HZO) thin-film capacitors by implementing W electrode. The W/HZO/W capacitor shows excellent pristine 2Pr values of 45.1 μC/cm2 at ±6 V, which are much higher than those of TiN/HZO/W (34.4 μC/cm2) and W/HZO/TiN (26.9 μC/cm2) capacitors. Notably, the maximum initial 2Pr value of W/HZO/W capacitor can reach as high as 57.9 μC/cm2 at ±7.5 V. These strong ferroelectric polarization effects are ascribed to the W electrode with a fairly low thermal expansion coefficient which provides a larger in-plane tensile strain compared with TiN electrode, allowing for enhancement of o-phase formation. Moreover, the W/HZO/W capacitor also exhibits higher endurance, smaller wake-up effect (10.1%) and superior fatigue properties up to 1.5 × 1010cycles compared to the TiN/HZO/W and W/HZO/TiN capacitors. Such improvements of W/HZO/W capacitor are mainly due to the decreased leakage current by more than an order of magnitude compared to the W/HZO/TiN capacitor. These results demonstrate that capping electrode material plays an important role in the enhancement of o-phase formation, reduces oxygen vacancies, mitigates wake-up effect and improves reliability.

KW - Endurance properties

KW - Ferroelectric polarization

KW - HfZrO films

KW - Thermal expansion coefficient

KW - W electrode

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U2 - 10.1016/j.jmst.2021.07.016

DO - 10.1016/j.jmst.2021.07.016

M3 - Journal article

AN - SCOPUS:85115118219

SN - 1005-0302

VL - 104

SP - 1

EP - 7

JO - Journal of Materials Science and Technology

JF - Journal of Materials Science and Technology

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