Ellipsometric spectra and growth of MgO thin films by pulsed laser deposition

Y.L. Zhang, D. Mo, X.Y. Chen, Chee Leung Mak, K.H. Wong, C.L. Choy

Research output: Journal article publicationJournal articleAcademic researchpeer-review


MgO thin films deposited on si(100) substrate have been prepared by pulsed laser deposition (PLD) at different conditions. The ellipsometric spectra of the MgO films have been obtained in the spectral range of 300~800 nm, and their optical constants and thickness are determined from the ellipsometric spectra. The optical constants and thickness of MgO films can be affected by the growth condition,and the results show that the higher vacuum, the higher substrate’s temperature and suitable laser energy is good for getting higher refractive index, higher density and good quality MgO thin films.
Original languageChinese (Simplified)
Pages (from-to)18-22
Number of pages5
Journal中山大學學報. 自然科學版 ( Acta scientiarum naturalium Universitatis Sunyatseni)
Issue number2
Publication statusPublished - 2003


  • MgO thin film
  • PLD
  • Ellipsometric spectra
  • Optical constants

ASJC Scopus subject areas

  • General

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