TY - JOUR
T1 - Electronic skin from high-throughput fabrication of intrinsically stretchable lead zirconate titanate elastomer
AU - Liu, Yiming
AU - Zheng, Huanxi
AU - Zhao, Ling
AU - Liu, Shiyuan
AU - Yao, Kuanming
AU - Li, Dengfeng
AU - Yiu, Chunki
AU - Gao, Shenghan
AU - Avila, Raudel
AU - Pakpong, Chirarattananon
AU - Chang, Lingqian
AU - Wang, Zuankai
AU - Huang, Xian
AU - Xie, Zhaoqian
AU - Yang, Zhengbao
AU - Yu, Xinge
N1 - Funding Information:
This work was supported by the City University of Hong Kong (Grant Nos. 9610423, 9667199), Research Grants Council of the Hong Kong Special Administrative Region (Grant No. 21210820), and Department of Science and Technology of Sichuan Province (Grant No. 2020YFH0181). Z.X. acknowledges the support from the National Natural Science Foundation of China (Grant No. 12072057) and Fundamental Research Funds for the Central Universities (Grant No. DUT20RC(3)032).
Publisher Copyright:
© 2020 Yiming Liu et al.
PY - 2020/10/17
Y1 - 2020/10/17
N2 - Electronic skin made of thin, soft, stretchable devices that can mimic the human skin and reconstruct the tactile sensation and perception offers great opportunities for prosthesis sensing, robotics controlling, and human-machine interfaces. Advanced materials and mechanics engineering of thin film devices has proven to be an efficient route to enable and enhance flexibility and stretchability of various electronic skins; however, the density of devices is still low owing to the limitation in existing fabrication techniques. Here, we report a high-throughput one-step process to fabricate large tactile sensing arrays with a sensor density of 25 sensors/cm2 for electronic skin, where the sensors are based on intrinsically stretchable piezoelectric lead zirconate titanate (PZT) elastomer. The PZT elastomer sensor arrays with great uniformity and passive-driven manner enable highresolution tactile sensing, simplify the data acquisition process, and lower the manufacturing cost. The high-throughput fabrication process provides a general platform for integrating intrinsically stretchable materials into large area, high device density soft electronics for the next-generation electronic skin.
AB - Electronic skin made of thin, soft, stretchable devices that can mimic the human skin and reconstruct the tactile sensation and perception offers great opportunities for prosthesis sensing, robotics controlling, and human-machine interfaces. Advanced materials and mechanics engineering of thin film devices has proven to be an efficient route to enable and enhance flexibility and stretchability of various electronic skins; however, the density of devices is still low owing to the limitation in existing fabrication techniques. Here, we report a high-throughput one-step process to fabricate large tactile sensing arrays with a sensor density of 25 sensors/cm2 for electronic skin, where the sensors are based on intrinsically stretchable piezoelectric lead zirconate titanate (PZT) elastomer. The PZT elastomer sensor arrays with great uniformity and passive-driven manner enable highresolution tactile sensing, simplify the data acquisition process, and lower the manufacturing cost. The high-throughput fabrication process provides a general platform for integrating intrinsically stretchable materials into large area, high device density soft electronics for the next-generation electronic skin.
UR - http://www.scopus.com/inward/record.url?scp=85096037818&partnerID=8YFLogxK
U2 - 10.34133/2020/1085417
DO - 10.34133/2020/1085417
M3 - Journal article
AN - SCOPUS:85096037818
VL - 2020
JO - Research
JF - Research
SN - 2096-5168
M1 - 1085417
ER -