Electrochemical Replication and Transfer for Low-Cost, Sub-100 nm Patterning of Materials on Flexible Substrates

Zijian Chen, Xi Lu, Huixin Wang, Jian Chang, Dongrui Wang, Wenshuo Wang, Sze Wing Ng, Mingming Rong, Peng Li, Qiyao Huang, Zhuofei Gan, Jianwen Zhong, Wen Di Li, Zijian Zheng

Research output: Journal article publicationJournal articleAcademic researchpeer-review

7 Citations (Scopus)

Abstract

The fabrication of high-resolution patterns on flexible substrates is an essential step in the development of flexible electronics. However, the patterning process on flexible substrates often requires expensive equipment and tedious lithographic processing. Here, a bottom-up patterning technique, termed electrochemical replication and transfer (ERT) is reported, which fabricates multiscale patterns of a wide variety of materials by selective electrodeposition of target materials on a predefined template, and subsequent transfer of the electrodeposited materials to a flexible substrate, while leaving the undamaged template for reuse for over 100 times. The additive and parallel patterning attribute of ERT allows the fabrication of multiscale patterns with resolutions spanning from sub-100 nm to many centimeters simultaneously, which overcomes the trade-off between resolution and throughput of conventional patterning techniques. ERT is suitable for fabricating a wide variety of materials including metals, semiconductors, metal oxides, and polymers into arbitrary shapes on flexible substrates at a very low cost.

Original languageEnglish
Article number2210778
JournalAdvanced Materials
Volume35
Issue number10
DOIs
Publication statusPublished - 9 Mar 2023

Keywords

  • additive manufacture
  • electrochemistry
  • flexible electronics
  • nanofabrication
  • pattern transfer

ASJC Scopus subject areas

  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering

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