Abstract
We have developed a method for fabricating polymer microstructures based on electric field induced self assembly and pattern formation. A dielectric fluid placed in between to conductive plates experiences a force in an applied electric field gradient across the plates, which can induce a diffusive surface instability and self construction of the fluid surface. This process is exploited for the fabrication of self assembled polymer microstructures as well as replicated patterns through the use of pre-patterned plates or electrodes. For directed pattern transfer, patterned ITO substrates were used. The method described can be used to fabricate a variety of structures in the micron and nanometer scales including bio-fluidic MEMS, polymer optoelectronic devices and patterned templates for nanolithography.
Original language | English |
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Title of host publication | 2003 Nanotechnology Conference and Trade Show - Nanotech 2003 |
Pages | 25-28 |
Number of pages | 4 |
Volume | 3 |
Publication status | Published - 1 Dec 2003 |
Externally published | Yes |
Event | 2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States Duration: 23 Feb 2003 → 27 Feb 2003 |
Conference
Conference | 2003 Nanotechnology Conference and Trade Show - Nanotech 2003 |
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Country/Territory | United States |
City | San Francisco, CA |
Period | 23/02/03 → 27/02/03 |
Keywords
- MEMS
- Self assembly
- Template replication
ASJC Scopus subject areas
- General Engineering