Abstract
Niobium (Nb)-doped lead zirconate titanate (PZT) films have been prepared on platinized silicon substrates using a sol-gel method. The Zr/Ti ratios of the films are 53/47 and 40/60, and the Nb doping level ranges from 0 mol% to 3 mol%. Similar to the cases in bulk ceramics, after the doping with Nb, the remanent polarization Pr, effective transverse piezoelectric coefficients e31,cand pyroelectric coefficient p of the PZT films increase; but the longitudinal effective piezoelectric coefficient d33,cremains roughly unchanged. At the optimum Nb doping levels, the observed Pr, -e31,cand p reach a maximum value of 30 μC/cm2, 18 C/m2and 350 μC/m2K, respectively, for the PZT (53/47) films, and 37 μC/cm2, 7.9 c/m2and 370 μC/m2K for the PZT (40/60) films. Our results also reveal that there exist linear relations between p, e31,c/εrand Pr.
Original language | English |
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Pages (from-to) | 148-153 |
Number of pages | 6 |
Journal | Journal of Sol-Gel Science and Technology |
Volume | 47 |
Issue number | 2 |
DOIs | |
Publication status | Published - 1 Aug 2008 |
Keywords
- Nb dopant
- Piezoelectric properties
- Pyroelectric properties
- PZT thin films
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- General Chemistry
- Biomaterials
- Condensed Matter Physics
- Materials Chemistry