Effects of N ion energy on titanium nitride films deposited by ion assisted filtered cathodic vacuum arc

G. Q. Yu, B. K. Tay, Shu Ping Lau, K. Prasad, L. K. Pan, J. W. Chai, D. Lai

Research output: Journal article publicationJournal articleAcademic researchpeer-review

31 Citations (Scopus)

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