Effects of frequencies of AC modulation voltage on piezoelectric-induced images using atomic force microscopy

C. H. Xu; C. H. Woo; San-Qiang Shi; Y. Wang

doi:10.1016/j.matchar.2004.06.006

Effects of frequencies of AC modulation voltage on piezoelectric-induced images using atomic force microscopy

C. H. Xu, C. H. Woo, San-Qiang Shi, Y. Wang

Research output: Journal article publication › Journal article › Academic research › peer-review

4 Citations (Scopus)

Abstract

Lead zirconate titanate (PZT) thin film is prepared by sol-gel method on Pt/Ti electrode/SiO2/Si wafer. Local poling is performed on the PZT film using an atomic force microscope (AFM). The topography and piezoelectric-induced (PEI) images on the polarized PZT film are recorded using AFM at piezo-responsive mode, operated with an AC voltage at varying frequencies. The best PEI image was obtained at the frequency around 300 kHz. It is explained that the change of piezoelectric vibrations and input noise signals with the frequency of AC modulation voltage affects the intensity of PEI images.

Original language	English
Pages (from-to)	319-322
Number of pages	4
Journal	Materials Characterization
Volume	52
Issue number	4-5
DOIs	https://doi.org/10.1016/j.matchar.2004.06.006
Publication status	Published - 1 Jul 2004

Keywords

Atomic force microscope
Modulation frequency
Piezoelectricity
Thin films

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

More information

10.1016/j.matchar.2004.06.006

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title = "Effects of frequencies of AC modulation voltage on piezoelectric-induced images using atomic force microscopy",

abstract = "Lead zirconate titanate (PZT) thin film is prepared by sol-gel method on Pt/Ti electrode/SiO2/Si wafer. Local poling is performed on the PZT film using an atomic force microscope (AFM). The topography and piezoelectric-induced (PEI) images on the polarized PZT film are recorded using AFM at piezo-responsive mode, operated with an AC voltage at varying frequencies. The best PEI image was obtained at the frequency around 300 kHz. It is explained that the change of piezoelectric vibrations and input noise signals with the frequency of AC modulation voltage affects the intensity of PEI images.",

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AU - Xu, C. H.

AU - Woo, C. H.

AU - Shi, San-Qiang

AU - Wang, Y.

PY - 2004/7/1

Y1 - 2004/7/1

N2 - Lead zirconate titanate (PZT) thin film is prepared by sol-gel method on Pt/Ti electrode/SiO2/Si wafer. Local poling is performed on the PZT film using an atomic force microscope (AFM). The topography and piezoelectric-induced (PEI) images on the polarized PZT film are recorded using AFM at piezo-responsive mode, operated with an AC voltage at varying frequencies. The best PEI image was obtained at the frequency around 300 kHz. It is explained that the change of piezoelectric vibrations and input noise signals with the frequency of AC modulation voltage affects the intensity of PEI images.

AB - Lead zirconate titanate (PZT) thin film is prepared by sol-gel method on Pt/Ti electrode/SiO2/Si wafer. Local poling is performed on the PZT film using an atomic force microscope (AFM). The topography and piezoelectric-induced (PEI) images on the polarized PZT film are recorded using AFM at piezo-responsive mode, operated with an AC voltage at varying frequencies. The best PEI image was obtained at the frequency around 300 kHz. It is explained that the change of piezoelectric vibrations and input noise signals with the frequency of AC modulation voltage affects the intensity of PEI images.

KW - Atomic force microscope

KW - Modulation frequency

KW - Piezoelectricity

KW - Thin films

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DO - 10.1016/j.matchar.2004.06.006

M3 - Journal article

SN - 1044-5803

VL - 52

SP - 319

EP - 322

JO - Materials Characterization

JF - Materials Characterization

IS - 4-5

ER -

Effects of frequencies of AC modulation voltage on piezoelectric-induced images using atomic force microscopy

Abstract

Keywords

ASJC Scopus subject areas

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