Effects of first rapid thermal annealing temperature on Co silicide formation

H. J. Peng, Z. X. Shen, E. H. Lim, C. W. Lai, R. Liu, A. T.S. Wee, A. Sameer, Jiyan Dai, B. C. Zhang, J. Z. Zheng

Research output: Journal article publication › Journal article › Academic research › peer-review