@inproceedings{0f07e993fec64b49891ca38d3233f223,
title = "Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet",
abstract = "The purpose of this paper is to study the effect of the inner pressure to the tool influence function (TIF) for polishing using a semi-rigid (SR) bonnet tool. The simulation model of a Semi-rigid (SR) bonnet polishing tool polishing BK7 is demonstrated and the pressure distribution data under different inflated-pressures in the contact area has been extracted. It's observed that the inflated-pressure has few effects to the polishing pressure, and their shapes are also Gaussian-like. Hence, we made a hypothesis that the effect of inflated-pressure to the TIF is rather small. To verify this hypothesis, a group of experiments to generate TIFs under different inflated-pressure are conducted, and the hypothesis has been proved to be correct through comparing these TIFs.",
keywords = "bonnet polishing, inflated-pressure, SR bonnet, tool influence function",
author = "Chunjin Wang and Xu Yang and Bo Zhong and Zhenzhong Wang and Yinbiao Guo and Qiao Xu",
note = "Publisher Copyright: {\textcopyright} 2014 SPIE. Copyright: Copyright 2015 Elsevier B.V., All rights reserved.; 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, AOMATT 2014 ; Conference date: 26-04-2014 Through 29-04-2014",
year = "2014",
doi = "10.1117/12.2067758",
language = "English",
volume = "9281",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Shengyi Li and Li Yang and Eric Ruch",
booktitle = "7th International Symposium on Advanced Optical Manufacturing and Testing Technologies",
address = "United States",
}