Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet

Chunjin Wang, Xu Yang, Bo Zhong, Zhenzhong Wang, Yinbiao Guo, Qiao Xu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

2 Citations (Scopus)

Abstract

The purpose of this paper is to study the effect of the inner pressure to the tool influence function (TIF) for polishing using a semi-rigid (SR) bonnet tool. The simulation model of a Semi-rigid (SR) bonnet polishing tool polishing BK7 is demonstrated and the pressure distribution data under different inflated-pressures in the contact area has been extracted. It's observed that the inflated-pressure has few effects to the polishing pressure, and their shapes are also Gaussian-like. Hence, we made a hypothesis that the effect of inflated-pressure to the TIF is rather small. To verify this hypothesis, a group of experiments to generate TIFs under different inflated-pressure are conducted, and the hypothesis has been proved to be correct through comparing these TIFs.

Original languageEnglish
Title of host publication7th International Symposium on Advanced Optical Manufacturing and Testing Technologies
Subtitle of host publicationAdvanced Optical Manufacturing Technologies
EditorsShengyi Li, Li Yang, Eric Ruch
PublisherSPIE
Volume9281
ISBN (Electronic)9781628413564
DOIs
Publication statusPublished - 2014
Externally publishedYes
Event7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, AOMATT 2014 - Harbin, China
Duration: 26 Apr 201429 Apr 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9281
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, AOMATT 2014
Country/TerritoryChina
CityHarbin
Period26/04/1429/04/14

Keywords

  • bonnet polishing
  • inflated-pressure
  • SR bonnet
  • tool influence function

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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