Effect of RuO2electrode on polarization fatigue resistance of PbZr0.52Ti0.48O3thin films

Bing Wang; Kin Wing Kwok; Helen Lai Wah Chan; Chung Loong Choy; Kwok Ying Tong

doi:10.1080/00150190108016018

Effect of RuO₂electrode on polarization fatigue resistance of PbZr_0.52Ti_0.48O₃thin films

Bing Wang
, Kin Wing Kwok
, Helen Lai Wah Chan
, Chung Loong Choy
, Kwok Ying Tong

Research output: Journal article publication › Journal article › Academic research › peer-review

2 Citations (Scopus)

Abstract

Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3, PZT) films of thickness 300 nm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/Si substrates. Either a ruthenium dioxide (RuO2) or platinum (Pt) top electrode was deposited on each film. The ferroelectric properties and the fatigue and current characteristics of the films were investigated. The film has a higher fatigue resistance but also a higher leakage current when one or both of the electrodes are made of RuO2. The RuO2/PZT/RuO2film exhibits negligible polarization fatigue, while the polarization of the RuO2/PZT/Pt and Pt/PZT/RuO2films decreases by about 40% after 109switchings. This suggests that the polarization fatigue in the PZT films is controlled not only by the top RuO2/PZT interface but also by the bottom PZT/RuO2interface.

Original language	English
Pages (from-to)	207-212
Number of pages	6
Journal	Ferroelectrics
Volume	260
Issue number	1
DOIs	https://doi.org/10.1080/00150190108016018
Publication status	Published - 1 Dec 2001

Keywords

fatigue
leakage current
PZT thin films
RuO electrodes 2

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

More information

10.1080/00150190108016018

Cite this

@article{2b24fb1750ae45d893c7d50bbb62c2ab,

title = "Effect of RuO2electrode on polarization fatigue resistance of PbZr0.52Ti0.48O3thin films",

abstract = "Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3, PZT) films of thickness 300 nm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/Si substrates. Either a ruthenium dioxide (RuO2) or platinum (Pt) top electrode was deposited on each film. The ferroelectric properties and the fatigue and current characteristics of the films were investigated. The film has a higher fatigue resistance but also a higher leakage current when one or both of the electrodes are made of RuO2. The RuO2/PZT/RuO2film exhibits negligible polarization fatigue, while the polarization of the RuO2/PZT/Pt and Pt/PZT/RuO2films decreases by about 40\% after 109switchings. This suggests that the polarization fatigue in the PZT films is controlled not only by the top RuO2/PZT interface but also by the bottom PZT/RuO2interface.",

keywords = "fatigue, leakage current, PZT thin films, RuO electrodes 2",

author = "Bing Wang and Kwok, \{Kin Wing\} and Chan, \{Helen Lai Wah\} and Choy, \{Chung Loong\} and Tong, \{Kwok Ying\}",

year = "2001",

month = dec,

day = "1",

doi = "10.1080/00150190108016018",

language = "English",

volume = "260",

pages = "207--212",

journal = "Ferroelectrics",

issn = "0015-0193",

publisher = "Taylor and Francis Ltd.",

number = "1",

}

TY - JOUR

T1 - Effect of RuO2electrode on polarization fatigue resistance of PbZr0.52Ti0.48O3thin films

AU - Wang, Bing

AU - Kwok, Kin Wing

AU - Chan, Helen Lai Wah

AU - Choy, Chung Loong

AU - Tong, Kwok Ying

PY - 2001/12/1

Y1 - 2001/12/1

N2 - Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3, PZT) films of thickness 300 nm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/Si substrates. Either a ruthenium dioxide (RuO2) or platinum (Pt) top electrode was deposited on each film. The ferroelectric properties and the fatigue and current characteristics of the films were investigated. The film has a higher fatigue resistance but also a higher leakage current when one or both of the electrodes are made of RuO2. The RuO2/PZT/RuO2film exhibits negligible polarization fatigue, while the polarization of the RuO2/PZT/Pt and Pt/PZT/RuO2films decreases by about 40% after 109switchings. This suggests that the polarization fatigue in the PZT films is controlled not only by the top RuO2/PZT interface but also by the bottom PZT/RuO2interface.

AB - Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3, PZT) films of thickness 300 nm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/Si substrates. Either a ruthenium dioxide (RuO2) or platinum (Pt) top electrode was deposited on each film. The ferroelectric properties and the fatigue and current characteristics of the films were investigated. The film has a higher fatigue resistance but also a higher leakage current when one or both of the electrodes are made of RuO2. The RuO2/PZT/RuO2film exhibits negligible polarization fatigue, while the polarization of the RuO2/PZT/Pt and Pt/PZT/RuO2films decreases by about 40% after 109switchings. This suggests that the polarization fatigue in the PZT films is controlled not only by the top RuO2/PZT interface but also by the bottom PZT/RuO2interface.

KW - fatigue

KW - leakage current

KW - PZT thin films

KW - RuO electrodes 2

UR - https://www.scopus.com/pages/publications/78649531356

U2 - 10.1080/00150190108016018

DO - 10.1080/00150190108016018

M3 - Journal article

SN - 0015-0193

VL - 260

SP - 207

EP - 212

JO - Ferroelectrics

JF - Ferroelectrics

IS - 1

ER -