Effect of RuO2electrode on polarization fatigue resistance of PbZr0.52Ti0.48O3thin films

Bing Wang, Kin Wing Kwok, Helen Lai Wah Chan, Chung Loong Choy, Kwok Ying Tong

Research output: Journal article publicationJournal articleAcademic researchpeer-review

2 Citations (Scopus)


Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3, PZT) films of thickness 300 nm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/Si substrates. Either a ruthenium dioxide (RuO2) or platinum (Pt) top electrode was deposited on each film. The ferroelectric properties and the fatigue and current characteristics of the films were investigated. The film has a higher fatigue resistance but also a higher leakage current when one or both of the electrodes are made of RuO2. The RuO2/PZT/RuO2film exhibits negligible polarization fatigue, while the polarization of the RuO2/PZT/Pt and Pt/PZT/RuO2films decreases by about 40% after 109switchings. This suggests that the polarization fatigue in the PZT films is controlled not only by the top RuO2/PZT interface but also by the bottom PZT/RuO2interface.
Original languageEnglish
Pages (from-to)207-212
Number of pages6
Issue number1
Publication statusPublished - 1 Dec 2001


  • fatigue
  • leakage current
  • PZT thin films
  • RuO electrodes 2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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