Effect of improved contact on reliability of sub-60 nm carbon nanotube vias

Keyphrases

• Carbon Nanotubes 100%
• Current Carrying Capacity 66%
• Metallized 33%
• Order of Magnitude 33%
• Resistivity 33%
• Current Density 33%
• On chip 33%
• Performance Constraints 33%
• Extraction Scheme 33%
• Contact Resistance 33%
• Interconnect Materials 33%
• Top Contact 33%
• Reliability Constraint 33%
• Semiconductor Technology 33%
• Physical Limits 33%
• Rapid Rise 33%
• Contact Engineering 33%
• On-chip Interconnects 33%
• Via Resistance 33%
• Chip Features 33%
• Resistance Extraction 33%
• High-aspect-ratio Microstructures 33%

Engineering

• Interconnects 100%
• Carbon Nanotubes 100%
• Current Carrying Capacity 66%
• Nanomaterial 33%
• Feature Size 33%
• Engineering 33%
• High Aspect Ratio 33%
• Alternative Material 33%

Material Science

• Carbon Nanotubes 100%
• Conductor 33%
• Contact Resistance 33%
• Nanostructure 33%
• Electrical Resistivity 33%
• Linewidth 33%
• Density 33%