Keyphrases
Tetrahedral Amorphous Carbon Film
100%
Filtered Cathodic Vacuum Arc
100%
Frequency Effect
100%
Pulse Width
100%
Substrate Pulse
100%
Deposition Rate
40%
G Peak
40%
Intrinsic Stress
40%
Surface Roughness
20%
Adhesion
20%
Rate of Increase
20%
Mechanical Behavior
20%
Raman Spectroscopy
20%
Duty Cycle
20%
Peak Width
20%
Intensity Ratio
20%
Arc System
20%
Adhesive Behavior
20%
Stress Reduction
20%
Microstructural Behavior
20%
Logarithmic Correlations
20%
Structural Adhesive
20%
Microstructural Evaluation
20%
Material Science
Tetrahedral Amorphous Carbon
100%
Carbon Films
100%
Film
100%
Morphology
100%
Surface Roughness
50%
Raman Spectroscopy
50%
Engineering
Tetrahedral Amorphous Carbon
100%
Pulse Duration
100%
Intrinsic Stress
40%
Deposition Rate
40%
Great Extent
20%
Rate Increase
20%
Duty Cycle
20%
Critical Load
20%
Agricultural and Biological Sciences
Critical Load
100%
Raman Spectroscopy
100%