Effect of frequency and pulse width on the properties of ta:C films prepared by FCVA together with substrate pulse biasing

D. Sheeja, B. K. Tay, L. J. Yu, Shu Ping Lau, J. Y. Sze, C. K. Cheong

Research output: Journal article publicationJournal articleAcademic researchpeer-review

30 Citations (Scopus)

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Engineering

Material Science

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Agricultural and Biological Sciences