Effect of fatigue on the pyroelectric and dielectric properties of PZT films

B. Wang, H. L.W. Chan, Kin Wing Kwok, Beatrix Ploss, C. L. Choy, K. Y. Tong

Research output: Journal article publicationJournal articleAcademic researchpeer-review

11 Citations (Scopus)

Abstract

Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3) films of thickness 1 μm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/ Si substrates. The crystallization of the films was studied by X-ray diffraction. The pyroelectric coefficient and dielectric permitivity of the PZT films were also investigated. It is well known that the use of oxide electrodes can reduce fatigue in PZT thin films. In this work, the effect of fatigue on the dielectric and pyroelectric properties of 1 μm thick PZT films was studied by comparing these properties before and after fatigue tests. As a fatigued film has lower switchable polarization, this study will reveal the correlation between dielectric and pyroelectric properties of PZT films and switchable polarization.
Original languageEnglish
Pages (from-to)1589-1592
Number of pages4
JournalJournal of the European Ceramic Society
Volume21
Issue number10-11
DOIs
Publication statusPublished - 31 Aug 2001

Keywords

  • Dielectric properties
  • Fatigue
  • Pyroelectric coefficient
  • PZT

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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