Effect of fatigue on the pyroelectric and dielectric properties of PZT films

B. Wang; H. L.W. Chan; Kin Wing Kwok; Beatrix Ploss; C. L. Choy; K. Y. Tong

doi:10.1016/S0955-2219(01)00071-1

Effect of fatigue on the pyroelectric and dielectric properties of PZT films

B. Wang, H. L.W. Chan, Kin Wing Kwok, Beatrix Ploss, C. L. Choy, K. Y. Tong

Research output: Journal article publication › Journal article › Academic research › peer-review

11 Citations (Scopus)

Abstract

Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3) films of thickness 1 μm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/ Si substrates. The crystallization of the films was studied by X-ray diffraction. The pyroelectric coefficient and dielectric permitivity of the PZT films were also investigated. It is well known that the use of oxide electrodes can reduce fatigue in PZT thin films. In this work, the effect of fatigue on the dielectric and pyroelectric properties of 1 μm thick PZT films was studied by comparing these properties before and after fatigue tests. As a fatigued film has lower switchable polarization, this study will reveal the correlation between dielectric and pyroelectric properties of PZT films and switchable polarization.

Original language	English
Pages (from-to)	1589-1592
Number of pages	4
Journal	Journal of the European Ceramic Society
Volume	21
Issue number	10-11
DOIs	https://doi.org/10.1016/S0955-2219(01)00071-1
Publication status	Published - 31 Aug 2001

Keywords

Dielectric properties
Fatigue
Pyroelectric coefficient
PZT

ASJC Scopus subject areas

Ceramics and Composites
Materials Chemistry

More information

10.1016/S0955-2219(01)00071-1

Cite this

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title = "Effect of fatigue on the pyroelectric and dielectric properties of PZT films",

abstract = "Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3) films of thickness 1 μm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/ Si substrates. The crystallization of the films was studied by X-ray diffraction. The pyroelectric coefficient and dielectric permitivity of the PZT films were also investigated. It is well known that the use of oxide electrodes can reduce fatigue in PZT thin films. In this work, the effect of fatigue on the dielectric and pyroelectric properties of 1 μm thick PZT films was studied by comparing these properties before and after fatigue tests. As a fatigued film has lower switchable polarization, this study will reveal the correlation between dielectric and pyroelectric properties of PZT films and switchable polarization.",

keywords = "Dielectric properties, Fatigue, Pyroelectric coefficient, PZT",

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T1 - Effect of fatigue on the pyroelectric and dielectric properties of PZT films

AU - Wang, B.

AU - Chan, H. L.W.

AU - Kwok, Kin Wing

AU - Ploss, Beatrix

AU - Choy, C. L.

AU - Tong, K. Y.

PY - 2001/8/31

Y1 - 2001/8/31

N2 - Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3) films of thickness 1 μm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/ Si substrates. The crystallization of the films was studied by X-ray diffraction. The pyroelectric coefficient and dielectric permitivity of the PZT films were also investigated. It is well known that the use of oxide electrodes can reduce fatigue in PZT thin films. In this work, the effect of fatigue on the dielectric and pyroelectric properties of 1 μm thick PZT films was studied by comparing these properties before and after fatigue tests. As a fatigued film has lower switchable polarization, this study will reveal the correlation between dielectric and pyroelectric properties of PZT films and switchable polarization.

AB - Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3) films of thickness 1 μm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/ Si substrates. The crystallization of the films was studied by X-ray diffraction. The pyroelectric coefficient and dielectric permitivity of the PZT films were also investigated. It is well known that the use of oxide electrodes can reduce fatigue in PZT thin films. In this work, the effect of fatigue on the dielectric and pyroelectric properties of 1 μm thick PZT films was studied by comparing these properties before and after fatigue tests. As a fatigued film has lower switchable polarization, this study will reveal the correlation between dielectric and pyroelectric properties of PZT films and switchable polarization.

KW - Dielectric properties

KW - Fatigue

KW - Pyroelectric coefficient

KW - PZT

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U2 - 10.1016/S0955-2219(01)00071-1

DO - 10.1016/S0955-2219(01)00071-1

M3 - Journal article

SN - 0955-2219

VL - 21

SP - 1589

EP - 1592

JO - Journal of the European Ceramic Society

JF - Journal of the European Ceramic Society

IS - 10-11

ER -

Effect of fatigue on the pyroelectric and dielectric properties of PZT films

Abstract

Keywords

ASJC Scopus subject areas

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